Sony Corporation

Toshihiko Iwanaga

Masumitsu Ino

Hiroyuki Ikeda

Kikuo Kaise

Takenobu Urazono

Hisashi Kadota

Takusei Sato

Kazuyoshi Yoshida

A thin film semiconductor device comprising a thin film transistor (TFT) having a thin film semiconductor on an insulation substrate to define an element region, and a hygroscopic interlayer insulating layer which covers said element,

Thin film semiconductor device for active matrix panel

The present invention provides a color display device in which the shape of an on-chip color filter pattern is improved to remove differences in height on the surface of a driving substrate. In the color display device, normal color filters are formed in alignment with pixel apertures, and a dummy color filter is formed in the spaces between the respective color filters apart from contact holes. Differences in height between the color filters and the spaces between the respective color filters are removed to obtain a color display device having excellent quality of liquid crystal alignment.

Color filter structure for color display device

A thin film semiconductor device comprising a thin film transistor (TFT) having a thin film semiconductor on an insulation substrate to define an element region, and a hygroscopic interlayer dielectric which covers the element. A hydrogenation treatment which comprises the interlayer dielectric provided thereon a cap film for blocking hydrogen diffusion, so that water entrapped by the interlayer dielectric may be decomposed to generate hydrogen which is allowed to diffuse into the thin film transistor provided on the side opposite to that of the cap film.

A synthetic quartz glass substrate (1) supporting active elements is formed of high-purity synthetic quartz glass having, a hydroxyl group content of 200 ppm or below and chlorine group content of 50 ppm or below. The substrate (1) may have an impurity level of 1 ppm or less sodium and 1 ppm or less aluminum. TFTs (6), i.e., active elements, and picture element electrodes (7) are formed on the surface of the synthetic quartz glass substrate (1) to construct a driving panel for a liquid crystal display of an active matrix type. A liquid crystal panel is formed by disposing the driving panel and a counter substrate (2) opposite to each other and sandwiching a liquid crystal layer (3) between the driving panel and the counter substrate (2).

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Kanagawa, Japan

Toshihiko Iwanaga