Sanyo Electric Co., Ltd.

Toshihiko Higashino

Noriyasu Sakai

Kouji Seki

Yoshio Yasaka

Takahiro Okuie

Ken Motoi

Kazuyoshi Ogino

The present invention solves a problem that in a wire bonding process, an inert gas used for prevention of oxidation of a substrate gave rise to shimmer due to the temperature difference during bonding, thereby degrading the precision of pattern recognition. With this invention's bonding device, shielding lids, andare disposed at upper and lower parts of a ring illuminationand at a lower part of lens barrel. Shimmerof nitrogen gas that blows out from a working holecan thus be prevented from entering inside ring illumination, especially by shielding lidat the lower part of ring illumination. As a result, the recognition precision of a recognition camera can be improved and the wire bonding precision of the &#x3bc;m order can be improved.

Recognition device, bonding device, and method of manufacturing a circuit device

The present invention solves a problem that in a wire bonding process, an inert gas used for prevention of oxidation of a substrate gave rise to shimmer due to the temperature difference during bonding, thereby degrading the precision of pattern recognition. With this invention's bonding deviceprovided with recognition device, a shimmer prevention blow mechanismis disposed between a ring illuminationand a working holeand near working hole. Though the nitrogen gas that blows out from working holegives rise to shimmer due to temperature difference, this shimmer can be blown away by the nitrogen gas blow from shimmer prevention blow mechanism. As a result, the recognition precision of a recognition camera can be improved and the wire bonding precision of the &#x3bc;m order can be improved.

The present invention solves a problem with a wire bonding device, that during a wire bonding process, a cover at the periphery of a working hole warps upward to cause inadvertent sparking to occur across the cover that has warped upwards and a torch electrode. This invention's bonding device provided with recognition device is characterized in that insulation treatment is applied to a part of a cover positioned at the periphery of a working hole . The interior of a working region is kept, for example, at 230&deg; C. by a heater inside a setting base , and by being placed under high temperature constantly, a part of cover warps upwards. However, since insulation treatment is applied to part of cover , a bonding device can be realized with which inadvertent sparking between a torch electrode will not occur.

Bonding device

The present invention solves a problem that in a wire bonding process, an inert gas used for prevention of oxidation of a substrate gave rise to shimmer due to the temperature difference during bonding, thereby degrading the precision of pattern recognition. With this invention's bonding device , shielding lids , and are disposed at upper and lower parts of a ring illumination and at a lower part of lens barrel . Shimmer of nitrogen gas that blows out from a working hole can thus be prevented from entering inside ring illumination , especially by shielding lid at the lower part of ring illumination . As a result, the recognition precision of a recognition camera can be improved and the wire bonding precision of the &mgr;m order can be improved.

The present invention solves a problem that in a wire bonding process, an inert gas used for prevention of oxidation of a substrate gave rise to shimmer due to the temperature difference during bonding, thereby degrading the precision of pattern recognition. With this invention's bonding device provided with recognition device, a shimmer prevention blow mechanism is disposed between a ring illumination and a working hole and near working hole . Though the nitrogen gas that blows out from working hole gives rise to shimmer due to temperature difference, this shimmer can be blown away by the nitrogen gas blow from shimmer prevention blow mechanism . As a result, the recognition precision of a recognition camera can be improved and the wire bonding precision of the &mgr;m order can be improved.

A magnetic recording/playback apparatus in which rotational torque from the drive shaft of a single motor is capable of being transmitted to a cassette loading mechanism and a tape loading mechanism includes a worm secured to the drive shaft and a worm wheel for being meshed freely with the worm, the worm wheel being provided with a toothless portion. The drive shaft is coupled to the cassette loading mechanism via the worm wheel. During operation of the tape loading mechanism by the drive shaft, the toothless portion of the worm wheel is brought into position opposite the worm wheel so that a driving force is no longer applied to the cassette loading mechanism. When a cassette is ejected, the toothless portion of the worm wheel is shifted after a tape loading operation, thereby reengaging the worm wheel and worm to actuate the cassette loading mechanism.

Growing community of inventors

Gunma, Japan

Toshihiko Higashino