Mitutoyo Corporation

Mitsubishi Denki Kabushiki Kaisha

Toshihiko Aoki

Kosaku Miyake

Nobutake Orime

Susumu Hishinuma

Takashi Katagi

Toru Yaku

Shozaburo Tsuji

Tetsuro Kiriyama

Fujio Maeda

Kenichi Nakayama

Yasuhiko Nishioka

Michihiko Togashi

Koushi Ogiso

A grating part includes a first transparent substrate having an optical grating on a surface thereof, a second transparent substrate having an optical grating on a surface thereof, and a spacer positioned between the first transparent substrate and the second transparent substrate, the spacer bonding the first transparent substrate and the second transparent substrate.

Grating part and manufacturing method thereof

A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of gratings at a predetermined interval; and a protective layer that is made of fluoride and covers the scale gratings and an exposed portion of the face of the substrate.

Scale and manufacturing method of the same

A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.

Scale and method of manufacturing the same

A scale includes a base material, scale patterns arranged at a predetermined periodicity on a main surface of the base material, and a fluorine film that covers the scale patterns and is at least partly a monomolecular fluorine compound.

Scale

A grating part includes a first transparent substrate having an optical grating on a first principal surface and a second transparent substrate having an optical grating on a first principal surface; a second principal surface of the first substrate on an opposite side from the first principal surface and a second principal surface of the second substrate on an opposite side from the first principal surface are bonded.

A scale includes a base material, an intermediate layer of soft magnetic material formed on one surface of the base material and roughened on face thereof opposite to the base material, and a scale pattern of a conductor formed on the intermediate layer.

A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1&#xd7;10/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1&#xd7;10/K.

A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of metal gratings at a predetermined interval; and an inorganic transparent member that is provided between the plurality of metal gratings, wherein at least a surface of the face of the substrate is made of a metal, and wherein the scale gratings and the inorganic transparent member are exposed to atmosphere.

A scale of a photoelectric encoder includes a base member and gratings on the base member. The gratings can be formed on the surface of the base member by plating and arranged at a prescribed pitch on the base member. The surface of the base member is a roughened surface which is roughened by sandblasting or with a chemical. The gratings are light absorptive gratings or light reflective metal gratings.

Scale of photoelectric encoder including base member having roughened surface and manufacturing method of scale

An inductive displacement detector of a rotary type is disclosed, which includes a first flux coupling winding and a second flux coupling winding alternately arranged on a rotor. The first flux coupling winding has a line conductor crossed. The second flux coupling winding has a line conductor not crossed. In the first and second flux coupling windings the transmission conductors thereof share a side.

Inductive displacement detector and micrometer

There is provided a displacement measuring device of which assembled state can be determined optically with ease. There is also provided a light spot position sensor usefully applicable in determination of the assembled state of the displacement measuring device. An optical encoder comprises a scale and a sensor head that is arranged opposite to the scale and can move relative to the scale. The sensor head includes a sensor substrate, on which an index grating and a photosensitive device array are formed. The sensor substrate is also employed to mount a light spot position sensor and a light source for providing a light beam entering the light spot position sensor via the scale to configure a state detection system for detecting an assembled state.

Light spot position sensor and displacement measuring device

A flat illuminant emits a beam of light toward a reflective scale having predetermined reference gratings formed thereon. A photoreceptive module is placed at a location between the flat illuminant and the reflective scale and closer to the flat illuminant. The photoreceptive module includes an array of photoreceptive devices, which also serves as illuminant-side gratings for partially shielding the beam from the flat illuminant.

Photoelectric encoder having improved light-emitting and photoreceptive sections

An optical displacement-measuring apparatus has a scale on which optical gratings are formed along a first axis and a second axis. It also has a sensor head arranged opposite to the scale and relatively movable along the first and second axes. The sensor head includes a photosensitive unit ( ) for optically detecting a relative movement to provide a displacement signal. The photosensitive unit ( ) includes a transparent substrate ( ). A photosensitive device array (PDAy) is formed with a semiconductor film deposited on the substrate ( ) and arrayed along the first axis at a certain pitch for providing a displacement signal corresponding to a displacement along the first axis. A photosensitive device array (PDAx) is formed with a semiconductor film deposited on the photosensitive device array (PDAy) sandwiching an insulator layer therebetween and arrayed along the second axis at a certain pitch for providing a displacement signal corresponding to a displacement along the second axis.

Optical displacement-measuring apparatus

The present invention has an object to provide a photoreceptor array with an excellent device property and no short fault between adjacent photoreceptors and to provide a method of manufacturing such the photoreceptor array with a high yield. On a transparent substrate ( ), a transparent electrode ( ) and a p-type amorphous silicon layer ( ) are formed. An insulating layer ( ) is deposited thereon to form a trench ( ). In the trench ( ), an i-type amorphous silicon layer ( ), an n-type amorphous silicon layer ( ) and an n-side electrode ( ) are buried in turn to form the photoreceptor array.

Light receiving array, method of manufacturing the array, and optical encoder using the array

An optical encoder is constructed by a reflection-type scale and a sensor head . The sensor head has an irradiation light source and a sensor board , the sensor board has a transparent substrate on which light-receiving areas for outputting displacement signals which have different phase with each other, and index gratings for modulating the scale irradiating light are formed to be alternately arranged. The index gratings are formed of the same material film as metal electrode of the light-receiving areas

Growing community of inventors

Kawasaki, Japan

Toshihiko Aoki