Dai Nippon Printing Co., Ltd.

Toshihide Ito

Tsuyoshi Yamauchi

Tsuyoshi Kashiwagi

Takeshi Kawakami

Yoshinori Tabata

In order to adjust the optical axis of a light beam Lin an exposure apparatus, on a support body in an XYZ three-dimensional coordinate system are mounted: a first mirrorhaving a reflective surface Mobtained by rotating a plane parallel to the XY plane around an axisparallel to the Y axis by an angle of &#x3b1;; and a second mirrorhaving a reflective surface Mobtained by rotating a plane parallel to the XZ plane around an axisparallel to the X axis by an angle of &#x3b2;. There are provided: position adjustment means for moving the entire support body having the two mirrors parallel to the XY plane; and angle adjustment means for adjusting the angle of the second mirror. The incident light Lis reflected on the reflective surfaces Mand Mto be output as an outgoing light L, where it is possible to perform an optical axis adjustment concerning position and angle by controlling the position adjustment means and the angle adjustment means.

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Hidaka, Japan

Toshihide Ito