Creative Technology Corporation

Toshifumi Sugawara

Yoshiaki Tatsumi

Megumu Kawae

Yu Saito

Hiroyuki Moriyama

Yasuyuki Temma

Eunsun Kim

Provided are a work heating device which is capable of heating a work piece with high soaking properties as well as fine temperature control and which remains highly reliable over a long-term use by preventing the deformation or the like of a chuck member, and a work treating device that uses the work heating device. The work heating device is a work heating device in which the chuck member including a work attraction electrode for work attraction and a heater member including a heating element for work heating are layered, and which is capable of heating with the heater member the work piece stuck by attraction on the chuck member side, in which the heater member includes a chuck attraction electrode for causing the chuck member to stick by attraction, between a surface of the heater member that is opposed to the chuck member and the heating element, so that the chuck member and the heater member are layered detachably. The work treating device is obtained by putting the work heating device on a base platform.

Work heating device and work treatment device

A particle collector system includes a dust collection unit, a power source unit, and a capacitance measurement unit. The dust collection unit includes first and second electrodes, a second electrode, and a dielectric body covering the electrodes. The power source unit supplies power source voltage to the first and second electrodes. The capacitance measurement unit measures the capacitance between the first and second electrodes. With this particle collector system and dust collection method using it, particles can be almost completely removed without periodic performance of a particle removal operation.

Particle collector system and dust collection method

An electrostatic chuck that enables high speed and high quality processing of a plate to be processed, and in which the weight of a base member is reduced and the strength thereof increased so as to maintain the flatness of the base member and prevent the plate to be processed from falling; a glass substrate processing method; and said glass substrate. An electrostatic chuck () provided with a base member () and an electrostatic suction layer (). The base member () is formed by a lower-surface plate (), side-surface plates (-), and an upper-surface plate (), and has a part () for a plurality of individual structures configured therein. The part () for a plurality of individual structures has a honeycomb structure that is caused by regular hexagonal tubes () and enables the weight of the base member () to be reduced and the strength thereof increased.

Electrostatic chuck, glass substrate processing method, and said glass substrate

Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad () mounted on a support plate, includes: a capacitance measuring device () including an electrode pair formed of first and second electrodes () and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device () being configured to measure capacitance of the electrode pair; and a comparator circuit () configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit () with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w).

Workpiece holder and method using same for detecting lateral displacement of workpiece

Provided is a detachable generator device which can change the installation location with ease and which can effectively use a solar cell to generate electric power. The detachable generator device includes: a film-like solar cell; and attaching/detaching means for allowing the film-like solar cell to be attached to and detached from an attachment object at an installation location. The attaching/detaching means includes an adhesive film having an attaching/detaching surface which develops Van der Waals force to enable repeated affixation, or an electrostatic chuck for forming an attaching/detaching surface by turning on/off a voltage source connected to an attraction electrode sandwiched between two insulating layers to freely develop electrostatic attraction on a surface of at least one of the insulating layers.

Growing community of inventors

Kawasaki, Japan

Toshifumi Sugawara