Lapis Semiconductor Co., Ltd.

Toshifumi Kobe

Toshiyuki Orita

Kenichi Furuta

Yuuki Doi

Masao Tsujimoto

Takao Kaji

Tsuyoshi Inoue

Yoshinobu Takeshita

Tomomi Yamanobe

Tomoko Yonekura

Masahiro Haraguchi

Makoto Higashihira

Kiyofumi Kondo

Kiyofumi Kondou

The disclosure reduces the risk of collapse of the wall surrounding the trench and suppresses the withstand voltage fluctuation that accompanies the manufacturing variation for a semiconductor device having a super junction structure. The semiconductor device includes a drift layer of a first conductivity type and a plurality of embedded parts embedded in the drift layer. The embedded parts are of a second conductivity type different from the first conductivity type, and the embedded parts are arranged with a first direction as a longitudinal direction and spaced from each other along a second direction that intersects the first direction. A width of each of the embedded parts in the second direction changes continuously along the first direction.

Semiconductor device having super junction structure with varying width

The semiconductor device includes a semiconductor substrate of first conductivity type including a cell area and a peripheral area surrounding cell area on a principal surface thereof, a first diffusion layer which is disposed in peripheral area, surrounds the cell area and has a second conductivity type different from the first conductivity type, an electrode which is disposed in the peripheral area, is in contact with the principal surface through an opening provided in an insulating member and is connected to the first diffusion layer, and a second diffusion layer of the first conductivity type which is formed on the principal surface of a region enclosed in the electrode distant from the first diffusion layer when viewed in a direction perpendicular to the principal surface and includes a linear portion having a first width and a curved portion having a portion with a second width greater than the first width.

Semiconductor device

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Miyazaki, Japan

Toshifumi Kobe