Nippon Telegraph and Telephone Corporation

Ntt Electronics Corporation

Nikon Corporation

Nippon Telegraph and Telephone Public Corporation

Toshiaki Tamamura

Saburo Imamura

Katsuhiko Kurumada

Masao Morita

Osamu Kogure

Masatoshi Kanaya

Akinobu Tanaka

Yoshihiko Suzuki

Keiichi Akagawa

Osamu Niwa

Tetsuyoshi Ishii

Shigekuni Sasaki

Akio Sugita

Shinji Ando

Fumio Yamamoto

Yasuko Maruo

Makoto Hikita

Tohru Matsuura

Shinsuke Matsui

Kenji Kurihara

Hiroshi Nozawa

Hiroyuki Ishii

Takashi Kurihara

Toshio Watanabe

Yasuyuki Inoue

Junji Suzuki

Katsunari Okamoto

Seiji Toyoda

Hideki Masuda

Makoto Satoh

Shoichi Hayashida

Tohru Ishizuya

Naoki Ooba

Masashi Nakao

Fumiyoshi Kano

Tatsuo Izawa

Katsuta

Yoshikuni

Yuichi Tohmori

Shigendo Nishi

Makoto Sato

A movable plate is fastened to a substrate via flexure parts and can move upward and downward with respect to the substrate. The substrate serves as a fixed electrode. The movable plate has second electrode parts which generate an electrostatic force between these electrode parts and the substrate by virtue of a voltage that is applied across these electrode parts and the substrate and a current path which is disposed in a magnetic field, and which generates a Lorentz force when powered. A mirror advances into and withdraws from the optical path. When the movable plate moves from the lower position in which the electrostatic force is increased to the upper position, the control part controls the current so that the Lorentz force is generated in a downward orientation and gradually decreases while the movable plate moves from an intermediate position to the upper position.

Microactuator device and optical switching system using the same

An optical device is configured such that an insertion plate is held by a flat cantilever having electric wiring, and the flat magnet is placed in such a manner that the magnet faces a surface of the cantilever opposite to the other surface of the cantilever facing an optical waveguide, and that the current flowing through the electric wiring is controlled in this state so that the Lorentz force caused by the interaction between the current and the magnetic field displaces the cantilever to drive the insertion plate, and to insert or remove the insertion plate into or out of the slit provided in the optical waveguide to switch the optical path of signal light or to adjust the quantity of an optical beam.

Optical device

The light guide substratehas mirror receiving groovesand light guides. The light guides conduct light that is input into the input ports to selected output ports in accordance with the advance and retraction of the mirrorswith respect to the grooves. The actuator substratehas mirrorsand actuators which place the mirrorsin a state in which the mirrors are drawn in toward the substrate, or a state in which the mirrors protrude from the substrate. The light guide substrateand actuator substrateare aligned using alignment marks and joined with a spacerinterposed so that the mirrorsretract from the grooveswhen the mirrorsare drawn in toward the substrate, and so that the mirrorsadvance into the grooveswhen the mirrorsprotrude from the substrate. This alignment is performed in a state in which all of the mirrorsare drawn in toward the substrate

Light-beam switching/adjusting apparatus and manufacturing method thereof

A waveguide type optical device performs such monitoring as detection of a relative position of an insert plate to a groove. The waveguide type optical device comprises a groove disposed at an intersection position of a first optical waveguide and a second optical waveguide; an insert plate disposed to be insertable into the groove; means for applying a static magnetic field such that a vector product of a velocity vector (A) of the insert plate and its magnetic field vector (B) is nonzero; a cantilever that has electrical wiring including therein a wiring part lying in a direction perpendicular to both the velocity vector and the magnetic field vector and that supports the insert plate; and means for detecting a relative position of the insert plate to the groove by detecting a current induced in the electrical wiring.

Waveguide type optical device and position detecting method

A matrix switch of an optical waveguide type which has low transmission loss variations and includes uniform grooves with a deep vertical cross section is provided. A switching part for selecting between a light path extending from an input port of a first set of optical waveguides-to an output port of the first set of optical waveguides-and a light path extending from an input port of the first set of optical waveguides-to an output port of a second set of optical waveguides-is arranged for insertion into a switching groove arranged at each of the intersections of the first set of optical waveguides-and the second set of optical waveguides-. Each of the switching grooves is arranged on an imaginary straight line connecting intersections of the first set of optical waveguides-and the second set of optical waveguides-.

Matrix switch of optical waveguide type and method for manufacturing the same

A resist material having a resist and particles mixed into the resist, a major component of the particles being a cluster of carbon atoms, is provided. A method for fabricating a resist material is also provided, the method repeatedly performing: a first step of coating a substrate with a resist film; and a second step of depositing particles whose major component is a cluster of carbon atoms on the resist film. Accordingly, a resist film with high etching resistance can be obtained, and it is possible to realize a reduction in the thickness of the resist film, improvements of contrast of resist patterns; resist sensitivity; heat resistance of resist films; mechanical strength of resist patterns; and further, stabilization of resist sensitivity. Therefore, highly precise fine pattern fabrication can be realized.

Resist material and fabrication method thereof

Method of manufacturing porous anodized alumina film

In a digital thermo-optic switch and an optical ADM filter of the present invention, functional components such as a splitter and a grating structure part formed in the course of an optical circuit as a component are composed of silicone materials which are superior in heat resistance, reduced loss, and low birefringence, thereby achieving sufficiently practical thermal stability, low loss at 1.55 to 1.58 .mu.m band, wavelength selectivity, and cost reduction.

Thermo-optic devices

A polyimide optical waveguide comprising a core made of polyimide whose refractive index is controlled to a predetermined value by electron beam irradiation, and a cladding set in contact with the core and having a refractive index lower than that of the core.

Polyimide optical waveguide and method of manufacturing the same

Polimide optical waveguide

The distributed reflector includes a substrate and at least one optical waveguide formed on the substrate and having a refractive index larger than the substrate and at least one optical confinement layer having a refractive index smaller than the optical waveguide layer. A diffractive grating is formed in at least one layer constituting the optical waveguide. The diffractive grating has a structure of which at least one parameter defining optical reflectivity varies depending on its position, and is formed continuously for at least two periods, the period being approximately defined by the length of repeating unit region. The parameter may be pitch, coupling coefficient, bandgap composition, phase shift, etc. The semiconductor laser includes the distributed reflector which may be of a distributed reflector type or distributed feed back type and has distributed reflector regions and a phase adjustment region. Application of current or voltage to the refractive index of the active region or inactive region in which a diffractive grating is present or absent adjusts the refractive index thereof and enables coarse and fine adjustment of lasing wavelength.

Distributed reflector and wavelength-tunable semiconductor laser

A polymer film with a conductive electrode has an insulated polymer film with an electrically conductive pattern containing an electrically conductive polymer of an aromatic compound, the conductive pattern being formed on at least one major surface of the insulated film, and an internal portion extending from the at least one major surface.

Polymer film with conductive pattern and method of manufacturing the same

The present invention provides a photosensitive resin composition used to form a top resist layer of a multilayer resist system, the composition comprising a photosensitive polyphenylsilsesquioxane represented by the following general formula (I) of: ##STR1## wherein X is selected from the group consisting of acryloyloxymethyl, methacryloyloxymethyl, and cinnamoyloxymethyl; and l, m and n are zero or positive integers but l and m do not take the value of zero simultaneously; and a bisazide compound added to act as a cross-linking agent. The photosensitive resin composition has high sensitivity to UV light and excellent resistance to reactive ion etching under oxygen gas (O.sub.2 RIE).

Photosensitive resin composition and process for forming photo-resist

Growing community of inventors

Tokyo, Japan

Toshiaki Tamamura