Canon Anelva Corporation

Canon Anelva Engineering Corporation

Toshiaki Sasaki

Masami Shibagaki

Hiroshi Doi

Yukihito Tashiro

Kazuhito Watanabe

Naoyuki Nozawa

Shinya Hasegawa

Akihiro Egami

Daisuke Kobinata

Satoshi Nakamura

A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.

Substrate transport apparatus, and system and method for manufacturing electronic device

A substrate heating apparatus having a conductive heater which heats a substrate includes a filament arranged in the conductive heater and connected to a filament power supply to generate thermoelectrons, and an acceleration power supply which accelerates the thermoelectrons between the filament and conductive heater. The filament has inner peripheral portions formed at a predetermined interval along an inner circle concentric with the substrate, outer peripheral portions formed at a predetermined interval on an outer circle concentric with the inner circle and having a diameter larger than that of the inner circle, and a region formed by connecting the end point of each inner peripheral portions and the end point of a corresponding one of the outer peripheral portions.

Substrate heating apparatus, heating method, and semiconductor device manufacturing method

Growing community of inventors

Tokorozawa, Japan

Toshiaki Sasaki