Hitachi, Ltd.

Nippon Telegraph and Telephone Corporation

Hitachi Global Storage Technologies Japan, Ltd.

Nippon Telephone and Telegraph Corporation

Hitachi Service Engineering, Ltd.

Toshiaki Kobari

Shigeo Nakamura

Shigenori Togashi

Kazuo Sakai

Masao Iwakura

Hayato Shimizu

Masayuki Kaiho

Mikio Tokuyama

Shozo Saegusa

Yuzo Yamaguchi

Manabu Matsumoto

Masahiko Sega

Toshihisa Okazaki

Satomitsu Imai

Shinjiroo Ueda

Mamoru Katane

Kazue Takahashi

Tadashi Otaka

Mikio Ichihashi

Takashi Ikeguchi

Shinjiro Ueda

Tadasi Sonobe

Hiroaki Sakurabata

Hironobu Matsui

Kenji Odaka

Nobuo Hirano

Shiro Matsuzaki

Hideaki Kamohara

Kazumasa Fujioka

Toru Murashita

Osamu Satou

Yasushi Nakaizumi

Akimitsu Okura

Shunji Kakiuchi

Satoshi Ido

Kazuo Kuroishi

Takao Takahashi

Yoshiaki Kazawa

Yasuhiko Ishida

Kunihiro Takahashi

Toyoki Kitayama

Minoru Hiroki

Hideiti Kimura

Toa Hayasaka

A magnetic disk apparatus includes a plurality of magnetic disks driven to rotate by a spindle motor, arms supporting magnetic heads on the magnetic disks, an actuator for moving the arms on the magnetic disks by a voice coil motor, and a housing which surrounds the magnetic disks, the arms and the actuator. A shroud which arcuately surrounds the magnetic disks along the outer periphery thereof has an opened portion for inserting the arms is formed in a part of the housing. The shroud on an upstream side of the arms relative to airflow generated by the magnetic disks when rotating is provided with an opening having a greater width than that of a gap defined between the shroud and the outer periphery of the magnetic disks. An empty bypass channel is provided which communicates from the opening through a rear side of the voice coil motor to the downstream side of the arms.

Magnetic disk apparatus with shroud and having open space downstream of moveable arms in communication with bypass channel

A magnetic disk apparatus includes magnetic disks stacked on a rotating shaft, arms supporting magnetic heads, a rotary actuator for moving the arms, and a housing forming at least a part of an arcuate-shaped shroud which substantially surrounds a portion of side surfaces of the magnetic disks so as to define a gap between the shroud and the portion of the side surfaces of the magnetic disks. The arcuate-shaped shroud has portions delimiting an open space adjacent to another portion of the side surfaces of the magnetic disks which is located on a downstream side of the arms relative to an air flow which moves on surfaces of the magnetic disks. A bypass channel provides air flow to the disks in a region of the open space at a reduced pressure on the downstream side of the arms with respect to pressure at an upstream side of the arms.

Magnetic disk apparatus with air flow bypass channel

In a magnetic disc apparatus including a plurality of magnetic discs mounted on a spindle, arms supporting magnetic heads, a rotary actuator for the arms, and a housing having an arcuate-shaped shroud, the improvement wherein gaps between the shroud and the sides of outer peripheries of the magnetic discs are larger than 0.1 mm and less than 0.6 mm. An open space is located, downstream of the arms with respect to the air flow on surfaces of the magnetic discs, the open space being devoid of the shroud. An opening is provided in the shroud, upstream of the arms with respect to the air flow and having a greater width than a width of the gaps defined between the magnetic discs and the shroud, and a bypass channel is provided which communicates between the opening and open space.

Magnetic-disc unit with gap between disc and shroud

A magnetic disk apparatus arranged in a housing having a plurality of magnetic disks stacked on a rotating shaft, arms supporting thereon magnetic heads and adapted to be inserted between said magnetic disks, a rotary actuator for moving the arms, a housing forming at least a part of an arcuate-shaped shroud which substantially surrounds a portion of side surfaces of the magnetic disks so as to permit movement of the arms and which is concentric with the magnetic disks so as to define a gap between the shroud and the portion of the side surfaces of said magnetic disks. The gap defined between the outer peripheral end surfaces of the magnetic disks and the shroud is in a range of 0.1 mm to 0.6 mm.

Magnetic disk apparatus

To suppress pressure fluctuation caused by insertion of arms between disks, which arms support thereon magnetic heads, to reduce disk flutter to thereby reduce disk driving power in a magnetic disk apparatus, there are provided an open space not covered by a shroud, which constitutes a part of a housing structure to cover a side surface of a disk stack, and provided on a downstream side of the arms relative to an airflow moving along surfaces of the disks as the disks rotate, and a channel, which connects a space on an upstream side of the arms and the open space not restricted by the shroud on the downstream side of the arms, the channel being provided with a linear section, which has a rectifying effect on the airflow.

Magnetic disk apparatus with shroud having opening downstream of moveable arm

A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.

Ultra-high vacuum apparatus

An apparatus for treating the inner surface of a vacuum chamber includes a support, means for anchoring the vacuum chamber to the support and holding the vacuum chamber, a broach having a plurality of cutting edges having cutouts, and broach drive means to which the broach arranged on the support is fitted. The broach drive means unidirectionally moves the broach relatively to the vacuum chamber in an axial direction to cut off a contaminated layer on an inner surface of the vacuum chamber. The outer diameter of each cutting edge, excluding the cutouts, is set greater than that of an immediately preceding one in a direction of a rearmost edge face from a front edge face. The apparatus may also include means for supplying an inert gas or a mixture of nitrogen and inert gases to a surface of the vacuum chamber being treated by the broach, or means for supplying a lower alcohol for dissolving contaminants contained in the contaminated layer to the surface of the vacuum chamber being treated by the broach.

Apparatus for treating the inner surface of vacuum chamber

A rod driver is used to drive a rod so as to move a broach through a continuous vacuum chamber in the axial direction. The broach is provided at the leading end of the rod with cutting and finishing edges at a plurality of stages in the axial direction. The cutting edges each have chip breakers in their outer periphery. The broach is moved in the vacuum chamber to cut the inner surface of the vacuum chamber, so that a new surface is formed. During the cutting at least one of an inert gas, nitrogen, and a mixture of the inert gas and nitrogen is supplied to the cutting edges. The outer diameter of the finishing edge is same as the desired inner diameter of the vacuum chamber and the finishing edges are effective in forming such a vacuum chamber with greater precision and the least friction. As a contaminated and decomposed layer on the inner surface of the vacuum chamber is removed in the axial direction of the inner surface of the vacuum chamber for certain, moreover, gas desorption, from a new surface, originating from thermal desorption and photodesorption generated at the time of synchrotron radiation can be minimized to satisfy a requirement for a vacuum vessel.

Process and apparatus for treating inner surface treatment of chamber

A charged particle beam apparatus includes a charged particle beam generating system for causing a charged particle source to generate a charged particle beam. A focusing system focuses the charged particle beam onto a sample. A deflecting system causes the focused charged particle beam to scan the surface of the sample. An evacuating system evacuates a space through which the charged particle beam passes. A detector detects information obtained by irradiating the charged particle beam onto the sample. An image display system displays as an image the status of distribution of the information over the sample surface based on a detection signal forwarded from the detector. The focusing system is entirely constituted by an electrostatic lens containing a plurality of lens electrodes, one of the lens electrodes being a final electrode located closest to the sample. All of the lens electrodes except for the final electrode are supplied with positive voltages as opposed to a negative voltage to the final electrode when the charged particle beam is negatively charged (e.g., electron beam). All of the lens electrodes except for the final electrode are supplied with negative voltages as opposed to a positive voltage to the final electrode when the charged electron beam is positively charged (e.g., positive ion beam). The deflecting system is so constructed as to deflect the charged particle beam within the inner space of the plurality of lens electrodes excluding the final electrode.

Charged particle beam apparatus including means for maintaining a vacuum

Charged particle beam apparatus having particular electrostatic

Synchrotron radiation is generated when a base of charged particles is bent by a bending magnet. The synchrotron radiation passes down a lead-out duct as the total number of pumps is limited by the size of the apparatus and many pumps are needed in order to achieve a good vacuum. An ion pump has a main magnetic field, normally generated by a magnet of the ion pump which controls the behavior of the electrons in the ion pump. However, the leakage magnetic field of the bending magnet affects the ion pump, and therefore the ion pump is arranged so that its main magnetic field is aligned with the leakage magnetic field at the ion pump, or at least with a main component thereof. In this way, the effect of the leakage magnetic field on the ion pump is reduced. Indeed, it is possible to use the leakage magnetic field as the main magnetic field of the ion pump.

Synchrotron radiation generation apparatus

An industrial compact synchrotron radiation source which can improve vacuum evacuation performance to prolong life-time of a charged particle beam and supply highly intensive stable synchrotron radiation. In the source, a charged particle beam bending duct forming a vacuum chamber through which the charged particle beam circulates is encompassed by a bending electromagnet, and at least one SR guide duct for guiding the radiation to outside extends from the outer circumferential wall of the bending duct. The SR guide duct is connected through a gate valve to an SR beam line duct for guiding the SR beam to an object to be worked and a vacuum pump is disposed on the side, close to an orbit of the charged particle beam, of the gate valve. The SR guide duct extending from the outer circumferential wall of the bending duct takes a form of a divergent duct which is widened in accordance with a spreading angle of the SR beam traveling through the SR guide duct.

Synchrotron radiation source

In a molecular beam epitaxy apparatus, the loading chamber for introducing the substrates is made separable from both the preparation chamber for cleaning the substrates and the growth chamber for forming thin films onto the respective substrates, so that the evacuation of the loading chamber is possible even when the loading chamber is separated from the apparatus, thus improving the productivity thereof.

Apparatus for manufacturing semiconductors

Growing community of inventors

Chiyoda, Japan

Toshiaki Kobari