Fujitsu Corporation

Nikon Corporation

Toshiaki Kitamura

Yuji Oinaga

Katsumi Onishi

Kazuyuki Shimizu

Muneki Hamashima

Kozo Takahashi

Koichiro Komatsu

Takeo Omori

A surface inspection apparatus of the present invention comprises: an illumination optical system which is fixed at a first predetermined angle with respect to a wafer and which irradiates a substantially parallel illuminating light toward the entire surface of the wafer an image pickup device which is fixed at a second predetermined angle with respect to the wafer and which receives diffracted light or scattered light from the wafer and projects an image of the wafer; and an image processing apparatus which performs a macro inspection by taking the image signal generated by the image pickup device and carrying out image processing, and is further provided with a plurality of interference filters F F to enable the variable setting of the wavelength of the illuminating light from the illumination optical system In this apparatus, macro inspections can be carried out efficiently on a variety of objects while apparatus such as the illumination apparatus and the image projection apparatus are maintained in fixed positions.

Method and apparatus for surface inspection

In the pattern matching method, when a reference pattern is extracted from the reference picture, check search is carried out repeatedly a plural number of times while conducting picture compressions on the reference picture with the compression start position being changed to obtain correlation values between the reference picture and the reference pattern. Based on the correlation values obtained by the check search, the number of times of search to be done actually and the picture compression ratio for the actual search are determined.

Method and apparatus for pattern matching

A focus detecting method includes the step of projecting the real image of an observation object including a plurality of object patterns onto an image pickup device through an optical system and producing image data from an output of the image pickup device, the step of calculating correlation values of the image data of each of the plurality of object patterns and the image data of a prestored reference pattern while varying the relative positional relation among the image pickup device, the optical system and the observation object in the direction of the optical axis of the optical system, and the step of judging a relative positional relation giving the maximum correlation value as an in-focus state. An apparatus is provided for carrying out the above-described focus detecting method.

Patter correlation type focus detecting method and focus detecting

A system for adjusting a performance of an information processing apparatus which provides a unit indicating a target performance value, a unit generating a corresponding performance control pulse in accordance with the target performance value, and an execution control unit which alternately sets an execution period and an execution inhibiting period in accordance with the performance control pulse. The unit which generates the performance control pulse sets a ratio of a pulse width and a pulse period of the performance control pulse coincide with the target performance value.

System for controlling operation of processor by adjusting duty cycle of

A system for computer pipeline operation in which a plurality of instructions are executed in parallel by commencing, before the termination of execution of the preceding instruction, the execution of the present instruction, including a conflict detection unit, a data establishment indication unit, and a source data by-pass unit. The source data by-pass unit by-passes a source data to the processing stage which requires this source data immediately after conflict is detected between the result data of the preceding instruction and the source data of the present instruction and the establishment of the source data of the present instruction is detected.

System for by-pass control in pipeline operation of computer

A system for adjusting a performance of an information processing apparatus which provides a unit indicating a target performance value, a unit generating a corresponding performance control pulse in accordance with the target performance value, and an execution control unit which alternately sets an execution period and an execution inhibiting period in accordance with the performance control pulse. The unit which generates the performance control pulse makes a ratio of a pulse width and a pulse period of the performance control pulse coincide with the target performance value.

Data processing system having a performance control pulse with a

Microprogram control system

An error recovery system in a data processor of the pipeline type, including control storage for storing instruction data, having an error correction and detection code adapted to the detection and correction of errors, for controlling the data processor. A parity check circuit checks instructions read from the control storage and stops at least a part of pipeline processing immediately upon the detection of an error. An error correction circuit corrects the error in the read instruction data and rewrites the instruction data into the control storage while the part of the pipeline processing is stopped.

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Tokyo, Japan

Toshiaki Kitamura