Kitz Sct Corporation

Screen Holdings Co., Ltd.

Toshiaki Iwabuchi

Toshihito Morioka

Hideaki Higuchi

Katsuhiko Honma

Satoru Fukatsu

Tsutomu Kojima

A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive sound and vibrations, and also having high durability. The vacuum gate valve includes housing bodies, a valve-body open/close driving body, and a stem provided with a valve body. Each of the housing bodies has therein a piston rod and a cam member with a cam groove. On each side of the valve-body open/close driving body, a cam roller and a fulcrum roller are provided. On an inner side of the housing body, a vertical movement guiding part and a stopper part are provided. A spring for causing the valve-body open/close driving body to ascend is provided between the valve-body open/close driving body and a fixed base part on a fixed side.

Vacuum gate valve

A treatment device treats a treatment subject inside a treatment chamber with treatment fluids of a plurality of types. An exhaust switching unit is provided to an exhaust pipe connected to the inside of the treatment chamber, and the exhaust switching unit is formed of a distribution box, switching valve boxes, and an exhaust tube. Additionally, the switching valve boxes, which correspond in number to the treatment fluids, are connected to the distribution box in a parallel state.

Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box

A vacuum gate valve includes a valve body open/close drive body provided between opposing housing bodies, a stem of the valve body open/close drive body, and a valve body provided to the stem. The housing bodies each has a piston rod vertically moving by a cylinder mechanism, a cam member of the piston rod, and a cam roller provided in a cam groove formed in the cam member. A spring receiving unit on both sides of the valve body open/close drive body and a spring which causes the spring receiving unit to be disposed in the cam member and resiliently supported between the spring receiving unit and the piston rod are provided. The housing body includes a vertical-movement guiding unit in which the valve body open/close driving body vertically moves between the housing bodies and a stopper by which the valve body open/close drive body is locked at ascending.

A pressure control butterfly valve includes a valve disc rotatable in a vertical direction relative to a flow passage in a body, a seat ring reciprocating in a direction of the flow passage to allow a valve seat seal part to abut on and separate from the valve disc, and a valve opening/closing mechanism provided with an airflow path to which air is supplied in a direction of separating the seat ring from the valve disc and with a spring for biasing the seat ring toward the valve disc. The valve opening/closing mechanism is for nonslidably rotating the valve disc from which the seat ring has been separated by supply of air to the airflow path and for allowing the seat ring to abut on and separate from the valve disc by means of the supply of air to the airflow path and the biasing force of the spring when the valve disc has been rotated to a valve-closed state, thereby controlling pressure in the flow passage.

Pressure control butterfly valve with opening/closing mechanism

A slide valve is provided, in which the conductance in the minimum region is controllable with high accuracy to enable stable control, a slide plate is prevented from plastically deforming to acquire good controllability of the minimum flow rate, and it is possible to detach a valve element and an air drive portion integrally with the slide plate, thereby facilitating the maintenance. The slide valve includes a body having a flow path, a slide plate provided within the body and between a closing position preventing a flow on the flow path and an open position permitting the flow, disposed perpendicularly relative to a flow path axis and movable horizontally or on a straight line, and a valve element incorporated in the slide plate and operated in a direction of the flow path axis to switch between the closing position and the open position of the slide plate by air cylinder drive. The slide plate has an upper surface and a lower surface that form small clearances in cooperation with the body when the valve element is in the open position, thereby enabling control of the minimum conductance. When the valve element has been in the closing position to induce a pressure difference load, the slide plate when receiving the pressure difference load is not plastically deformed.

Slide valve

A diaphragm valve for opening or closing itself through making direct contact of or through breaking the direct contract of a metal diaphragm with a valve seat disposed inside a body provided with an inlet port and an outlet port. The diaphragm valve includes an elevating member which serves to make or break the direct contact of the metal diaphragm with the valve seat and which is fusion-bonded to the metal diaphragm.

Diaphragm valve

An automatic-and-manual operation composite valve includes a valve main body into which an air is supplied and from which the air is discharged, a piston provided within the valve main body to be vertically movable by means of the air supplied or discharged and a snapping force of a spring attached to the piston, a valve body provided within the valve main body, and opened and closed by the piston, an air switch valve portion provided within the valve main body for switching air supply and air discharge and a manual operation mechanism portion for operating the air switch valve portion.

Composite valve for gas supply system

A gate valve includes a valve main body having a gate valve body attached to a valve rod; a movement operation mechanism that moves the valve rod in a direction along an axis of the rod up to a position where the gate valve body stops up a flow passage port used for carrying in and out objects; a rotating motion mechanism for rotating the valve rod, which has been moved to that position, by a predetermined angle; and a horizontal drive gear for moving the valve body in a direction orthogonal to the direction of movement of the valve rod to seal the flow passage port.

Non-rubbing gate valve for semiconductor fabrication apparatus

A valve has a valve body having a passage including a hole in which gas flows. A valve disc is provided for closing the hole, and an actuator is provided for operating the valve disc. An emergency cutoff device is provided so that the valve disc closes the hole in an emergency when electric power supply is cut off.

Growing community of inventors

Gunma, Japan

Toshiaki Iwabuchi