Shibaura Machine Co., Ltd.

Toshiba Kikai Kabushiki Kaisha

Toshiaki Goto

Mitsunori Kokubo

Takato Baba

According to one embodiment, a transfer apparatus includes a coating part for coating an uncured resin on a substrate, a substrate installation part for positioning and installing the substrate integrally, a mold installation part for installing a sheet-like mold, a transfer roller for transferring a fine transfer pattern formed on the mold to the resin coated on the substrate, and a plasma unit for cleaning the mold by irradiating plasma to the mold peeled off from the resin after transferring. After cleaning by the plasma using the plasma unit, the cleaned mold is used again for transferring of the transfer pattern.

Transfer apparatus

A transfer apparatus includes a rolled web mold installation part for installing a rolled web mold around which the mold is wound, a transfer roller for winding the mold fed out from the rolled web mold, a winding roll for winding up the mold, a winding roll installation part for installing the winding roll therein, and a mold installation assisting part for guiding the mold fed out from the rolled web mold up to the winding roll while suppressing an occurrence of wrinkles in the mold fed out from the rolled web mold.

Transfer apparatus and transfer method

According to one embodiment, a transfer apparatus includes a transfer roller which supports a mold and transfers a fine transfer pattern formed on the mold to a resin coated on a substrate installed in a substrate installation part with movement of the transfer roller and a transfer roller guide part for guiding the transfer roller when the mold is pressed against the resin coated on the substrate installed in the substrate installation part by the movement of the transfer roller.

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Numazu, Japan

Toshiaki Goto