Horiba Stec, Co., Ltd.

Canon Kabushiki Kaisha

Tokyo Electron Limited

Toru Shimizu

Masakazu Minami

Yuhei Sakaguchi

Takeshi Akamatsu

Yuichi Furuya

Yasunori Furukawa

Daisuke Hayashi

Yoshiaki Nakata

Masayuki Tanaka

In order to prevent cracking of a window material in manufacturing an optical measurement cell that satisfies various performances required for airtightness, heat resistance, and the like by atomic diffusion bonding, an optical measurement cell into which a sample is introduced includes a light transmission window through which light is transmitted, and includes a window material forming the light transmission window, and a flange member to which the window material is bonded via a metal thin film, and a ratio of a thermal expansion coefficient of the flange member to a thermal expansion coefficient of the window material is 0.5 times or more and 1.5 times or less.

Optical measurement cell, optical analyzer, window forming member, and method of manufacturing optical measurement cell

The present invention reduces thermal stress that is generated in a join portion of a window material in an optical measurement cell, and is an optical measurement cell having translucent windows through which light is transmitted and into an interior of which is introduced a test sample. This optical measurement cell has a planar window material that forms the translucent windows, a join supporting portion that is joined to an outer edge portion of a main surface of the window material and supports the window material, and a low thermal expansion component that is provided on an outer-side circumferential surface of the join supporting portion and whose coefficient of thermal expansion is lower than a coefficient of thermal expansion of the join supporting portion.

Optical measurement cell and optical analysis device

In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filterthat is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filterthat is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculatorthat is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filterand a second absorbance measured by the light transmitted through the CO filter

Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded

Provided is a concentration control module that improve responsiveness of concentration control of a vaporization system, and is used in a vaporization system. The concentration control module includes a concentration measuring part configured to measure a concentration of a source gas; a valve provided in a lead-out pipe configured to lead out the source gas from the tank; a pressure target value calculating part configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measuring part; a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculating part; and a valve control part configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.

Vaporization system and concentration control module used in the same

In order to provide a concentration control apparatus that, without adding any new sensors or the like, makes it possible to accurately estimate a quantity of source consumed inside a vaporization tank, and to perform highly accurate concentration control in accordance with the remaining quantity of source, there is provided a concentration control apparatus that, in a vaporizer that is equipped with at least a vaporization tank containing a liquid or solid source, a carrier gas supply path that supplies a carrier gas to the vaporization tank, and a source gas extraction path along which flows a source gas which is created by vaporizing the source and is then extracted from the vaporization tank, controls a concentration of the source gas and includes a concentration monitor that is provided on the source gas extraction path, and outputs output signals in accordance with a concentration of the source gas.

Concentration control apparatus, source consumption quantity estimation method, and program recording medium on which a program for a concentration control apparatus is recorded

In order to inhibit overshoot in the concentration of a source gas immediately after a gas supply period starts, there is provided a vaporization device that is equipped with a vaporization tank that holds a liquid or a solid source, a carrier gas supply path that supplies carrier gas to the vaporization tank, a source gas extraction path along which flows a source gas which is obtained by vaporizing the source and which is extracted from the vaporization tank, a concentration monitor that is provided on the source gas extraction path, and a concentration control mechanism that is provided with a fluid controller which controls a concentration of the source gas extracted from the source gas extraction path. This vaporization device alternates between supplying the source gas and stopping the supply of the source gas.

Vaporization device, film formation device, program for a concentration control mechanism, and concentration control method

In order to make it possible to conduct a zero calibration even though an interference gas exists in a measurement area of a detector, a light absorbance analysis apparatus includes a detector that detects an intensity of light that transmits a gas, a total pressure sensor that measures a total pressure of the gas, an absorbance calculating part that calculates an absorbance based on an output value of the detector and a previously set zero reference value, a partial pressure&#x2014;absorbance relation storing part that stores a partial pressure&#x2014;absorbance relational data that indicates a relationship between a partial pressure of an interference gas that exists in a measurement area of the detector and an absorbance calculated by the absorbance calculating part, and a partial pressure calculating part that calculates an interference gas partial pressure as a partial pressure of the interference gas.

Light absorbance analysis apparatus and program record medium for recording programs of light absorbance analysis apparatus

A concentration control apparatus capable of appropriately making a zero adjustment of a concentration measurement mechanism without interrupting a semiconductor manufacturing process includes: a control valve that controls gas flowing through a lead-out flow path; a concentration measurement mechanism that measures the concentration of source gas contained in gas flowing through the lead-out flow path; a concentration controller that controls the control valve so that the deviation between measured concentration measured by the concentration measurement mechanism and preset set concentration decreases; a judgement time point determination part that determines a judgement time point that is the time point when the gas present in a measurement part where the concentration measurement mechanism performs the concentration measurement has been replaced with other gas; and a zero adjustment part that makes a zero adjustment of the concentration measurement mechanism at or after the judgement time point.

Concentration control apparatus, zero point adjustment method, and program recording medium recorded with concentration control apparatus program

An absorption spectroscopic system is provided with a detector that detects an intensity of light transmitted through a gas, a total pressure sensor that measures a total pressure of the gas, an interference gas partial pressure-absorbance relationship storage unit that stores interference gas partial pressure-absorbance relationship data, an interference gas partial pressure estimation unit that estimates the partial pressure of the interference gas based on the total pressure measured by the total pressure sensor, an interference gas absorbance conversion unit that converts an estimated partial pressure of the interference gas estimated by the interference gas partial pressure estimation unit into an absorbance of the interference gas based on the interference gas partial pressure-absorbance relationship data, and a target gas absorbance calculation unit that calculates an absorbance of the target gas based on output values from the detector and on the absorbance of the interference gas.

Absorption spectroscopic system, program recording medium for an absorption spectroscopic system and absorbance measurement method

In a concentration controller that intermittently leads out material gas from a vaporization tank, in order to control the flow rates of carrier and diluent gases so that the concentration of the material gas can be suppressed from overshooting immediately after the start of material gas supply period, the concentration controller is adapted to include: a concentration calculation part that calculates the concentration of the material gas on the basis of an output signal from a concentration monitor; and a set flow rate calculation part that, on the basis of actual concentration calculated by the concentration calculation part, an actual flow rate outputted from a flow rate control device or the set flow rate of the flow rate control device, and a preset target concentration, calculates the initial set flow rate of the flow rate control device.

Concentration controller, gas control system, deposition apparatus, concentration control method, and program recording medium for concentration controller

Provided is a concentration control apparatus that, without reducing maintainability, can shorten piping to improve responsiveness. The concentration control apparatus is one adapted to introduce carrier gas into a storage tank storing a material, and control the concentration of material gas that is led out of the storage tank as mixed gas with the carrier gas and results from vaporization of the material. Also, the concentration control apparatus includes: a first unit that controls the flow rate of the carrier gas to be introduced into the storage tank; and a second unit that detects the concentration of the material gas led out of the storage tank.

Concentration control apparatus and material gas supply system

The present invention makes it easy to control the amount of material gas led out of a tank. Accordingly, carrier gas is introduced into a tank containing a material and together with the carrier gas, from the tank, material gas produced by vaporization of the material is led out. A control part controls the flow rate of the carrier gas so that a concentration index value obtained by measuring mixed gas led out of the tank and indicating the concentration of the material gas in the mixed gas comes close to a predetermined target concentration index value. In addition, the control part controls the flow rate of the carrier gas to change at a predetermined change rate, and then controls the flow rate of the carrier gas on the basis of the deviation between the concentration index value and the target concentration index value.

Gas control system, deposition apparatus including gas control system, and program and gas control method used for gas control system

The present invention provides a measurement method of measuring a surface shape of a measurement target surface including an aspherical surface by using a measurement apparatus including an optical system which guides a light from the measurement target surface to a detection unit having a detection surface, including a step of converting, into coordinates on the measurement target surface by using a coordinate conversion table, coordinates on the detection surface that indicate positions where light traveling from the measurement target surface enters the detection surface, and a step of converting, by using an angle conversion table, angle differences between angles of light reflected by a reference surface and angles of light reflected by the measurement target surface at the respective coordinates on the detection surface into angle differences at a plurality of respective coordinates on the measurement target surface that correspond to the respective coordinates on the detection surface.

Growing community of inventors

Kyoto, Japan

Toru Shimizu