Akebono Brake Industry Co., Ltd.

Japan Oil, Gas and Metals National Corporation

Toru Sekine

Takashi Kunimi

Takahiro Tsunoda

In a method for fabricating an electrostatic capacitance-type acceleration sensor having a capacitor which electrostatic capacitance between a movable electrode and a fixed electrode changes according to the displacement of the movable electrode, the method includes: a step of forming a groove on at least one of the surface of an insulative substrate and the surface of a semiconductor substrate; a step of forming a hole in the semiconductor substrate so as to penetrate the semiconductor substrate at a position communicating with a passage formed by the groove; and a step of forming an electrode extraction hole in the insulative substrate so as to penetrate the insulative substrate, at a position communicating with the passage formed by the groove.

Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor

An acceleration sensor circuitof the invention includes an acceleration sensorhaving a first capacitor Cwhose capacitance changes according to a position of a first movable electrode and a second capacitor Cwhose capacitance changes as opposed to the first capacitor according to a position of a second movable electrode moved together with the first movable electrode, a first circuitA for generating a sinusoidal AC signal of a predetermined frequency, a second circuitfor generating a signal according to the positions of the movable electrodes, and an arithmetic circuitfor analyzing data in which a signal generated by the second circuitis encoded and outputting data of acceleration.

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Tokyo, Japan

Toru Sekine