Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ebara Corporation (1 from 2,512 patents)
2. Ckd Corporation (1 from 318 patents)
1 patent:
1. 8298369 - Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid