Nippon Sanso Corporation

Toru Nagasaka

Tadahiro Ohmi

Yoshio Ishihara

Shigeru Hayashida

Tetsuya Kimijima

There is provided a method and an apparatus for collecting a rare gas, which are capable of effectively collecting the rare gas contained in an exhaust gas exhausted from a rare gas using apparatus such as a plasma apparatus or the like, and moreover capable of securely supplying the rare gas having a predetermined purity to the rare gas using apparatus, and the method for collecting rare gas which comprises collecting a rare gas contained in an exhaust gas exhausted from a rare gas using apparatus operated under decompression, the method comprises the step of collecting the rare gas by separating the rare gas and impurities contained in the exhaust gas via at least two gas separating steps.

Growing community of inventors

Tokyo, Japan

Toru Nagasaka