Atlantic Inertial Systems, Inc.

Sumitomo Precision Products

Toru Kitamura

Kevin Townsend

Christopher Paul Fell

Ian Michael Sturland

Ryuta Araki

Osamu Torayashiki

Koji Nakamura

Tsuyoshi Takemoto

Hiroshi Kawasaki

A vibrator, which is formed in a silicon waferby means of MEMS technique, has eight beam portions (beams)supported at a central portionand extending in the radial direction while mutually keeping the same angle and has a ring portionconnected to the eight beam portions. Outside the ring portion, eight electrodestofor electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gapcreated between the ring portionand the electrodesto. Inside the ring portion, sixteen electrodesfor frequency adjustment are spaced uniformly with a gapcreated between the ring portionand the electrodes

Angular velocity sensor with vibrator having ring portion and electrodes positioned inside and outside the ring portion

Growing community of inventors

Amagasaki, Japan

Toru Kitamura