Dainippon Screen Mfg. Co., Ltd.

Toru Kitamoto

Kenji Kamei

Tetsuya Hamada

Hidekazu Inoue

Yasufumi Koyama

Kenji Hashinoki

Satoshi Yamamoto

Toshiaki Dainin

A substrate processing apparatus and an information storage server are connected with each other through a network. A storage part of the substrate processing apparatus stores set information and a control program, for controlling operation of the substrate processing apparatus according to the set information and the control program. The substrate processing apparatus is provided with a schedule function, for transmitting a backup instructional command according to the schedule. In response to this instructional command, the substrate processing apparatus generates a duplicate of specified information stored in the aforementioned storage part and transfers the duplicate information to the information storage server through the network. The information storage server stores the received duplicate information in a hard disk as backup data. The information storage server can also store only differential data of the duplicate information. Thus, information for controlling the operation of the substrate processing apparatus can be efficiently backed up without burdening the user.

Managing apparatus for substrate processing system

A substrate processing system comprises a substrate processing apparatus, an information storage server and a support computer, which are connected to a network respectively. When the substrate processing apparatus causes a failure, an alarm processing part extracts a necessary relevant log file and stores the same in a hard disk of the information storage server. A failure information generation part generates failure information, which in turn is finally stored in the hard disk of the information storage servers as a failure information database. An apparatus information uncasing part renders the relevant log file and the failure information database readable from the support computer located in a remote place. Thus, the relevant log file and the failure information database can be immediately read. In other words, provided is a substrate processing system rendering operation information immediately readable from a remote place when the substrate processing apparatus causes a failure.

Substrate processing system managing apparatus information of substrate processing apparatus

A substrate processing system comprises a substrate processing apparatus and a support computer, which are connected to a network respectively. Updated countermeasure information is accumulated in the support computer by a system administrator. When the substrate processing apparatus causes a failure, content of the failure is displayed on a display part while an alarm processing part controls process according to an alarm definition file. Further, a countermeasure information acquisition part requires updated countermeasure information against the failure from the support computer. In response to this, countermeasure information distribution part of the support computer transmits updated countermeasure information. Thus, updated countermeasure information can be read instantly when a failure occurs.

A substrate treating apparatus has an antireflection film forming block, a resist film forming block and a developing block arranged in juxtaposition, each of these blocks including treating modules and a single main transport mechanism. The main transport mechanism transports substrates within each block, and transfers the substrates between the blocks through inlet substrate rests and outlet substrate rests provided as separate components. This construction realizes improved throughput of the substrate treating apparatus.

Substrate treating apparatus

The invention provides a printing data management system which realizes unitary control and management of printing data including parts data like pictures and photographs used in reproduction and assembled data so as to improve the efficiency of prepress process. The system is provided with an edit device for editing various process control data, which includes: discrimination data for identifying a target print from other prints; and instruction data, file management data, and individual progress data generated corresponding to each of plural jobs. An operator can readily control the progress of each job throughout the prepress process based on this process control data. The system of the invention also allows efficient information storage and retrieval.

Growing community of inventors

Kyoto, Japan

Toru Kitamoto