Horiba Stec, Co., Ltd.

Toru Ikeda

Kotaro Takijiri

Junji Aoki

Provided is an excellent residual gas analyzer, which can perform measurements while being suitably arranged even in small areas, such as those in semiconductor equipments, and can perform measurements for display of measurement results without an external personal computer. The analyzer is provided with a sensor unit having a sensor section for detecting a residual gas; an operating section for receiving operation for controlling the sensor section; a residual gas analysis processing section for processing analysis of the residual gas based on the output from the sensor section; and an analysis processing result screen display section for displaying on a screen the analysis processing results obtained from the residual gas analysis processing section. The analyzer is also provided with a device main body which can be in a mounted status wherein the sensor unit is mounted or in a removed status wherein the sensor unit is removed.

Residual gas analyzer

The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase of a cost with an easy manufacturing. The present invention is a diaphragm attaching structure of an electrostatic capacity type pressure gauge in which a diaphragm for receiving a fluid pressure is provided in a tensional manner on one end of a tubular case, and a fixed side electrode for picking up a deflection displacement of the diaphragm as a change of an electric capacity is provided within the tubular case on a side opposite to a pressure receiving surface of the diaphragm, wherein an outer peripheral edge portion of the diaphragm is formed thicker than a center portion thereof, and the thick outer peripheral edge portion is thermally molten to be welded and firmly attached to an end surface portion around the opening on the one end of the tubular case.

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Kyoto, Japan

Toru Ikeda