Sumitomo Heavy Industries, Ltd.

Tohoku Techno Arch Co., Ltd.

Toru Hirata

Yoshiyuki Tomita

Satoshi Kiyono

Wei Gao

Kennichi Makino

Yoji Watanabe

A resin molding apparatus capable of enhancing transfer accuracy, reducing the cost of a molding apparatus, and shortening a molding cycle. The resin molding apparatus includes a first mold; a second mold disposed in opposition to the first mold; a transfer plate () attached to one of the first and second molds and comprising a transfer surface bearing a pattern of pits and projections and oriented toward a cavity (C, C); and a thermal insulation layer () disposed between the transfer plate () and the one of the first and second molds and formed through growth from the transfer plate () side or from the one of the first and second mold sides. Being disposed between the transfer plate () and the one of the first and second molds, the thermal insulation layer () can restrain dissipation of thermal energy of a molding material toward the mold. This can restrain formation of a skin layer, which would otherwise result from a sharp drop in temperature of the molding material, whereby transfer accuracy can be enhanced.

Resin molding apparatus

Disclosed is a resin molding apparatus capable of enhancing transfer accuracy, reducing the cost of a molding apparatus, and shortening a molding cycle. The resin molding apparatus includes a first mold; a second mold disposed in opposition to the first mold; a transfer plate () attached to one of the first and second molds and comprising a transfer surface bearing a pattern of pits and projections and oriented toward a cavity (C, C); and a thermal insulation layer () disposed between the transfer plate () and the one of the first and second molds and formed through growth from the transfer plate () side or from the one of the first and second mold sides. Being disposed between the transfer plate () and the one of the first and second molds, the thermal insulation layer () can restrain dissipation of thermal energy of a molding material toward the mold. This can restrain formation of a skin layer, which would otherwise result from a sharp drop in temperature of the molding material, whereby transfer accuracy can be enhanced.

Resin molding apparatus and resin molding method

According to one aspect of the invention, there is provided a sensor device which is capable of detecting a state of a movable stage using an easily manufacturable reference grating and capable of improving the accuracy of detection. The sensor device comprises a reference grating which has a configuration that is varied periodically in a two-dimensional direction. A light source emits light to the reference grating. A spectral unit has a plurality of openings to convert the light emitted by the light source into a plurality of light beams through the plurality of openings. A detector unit has a photodetector to receive collectively reflected light beams reflected by the reference grating. The detector unit is provided to detect a state of a movable body relative to the reference grating based on a change of the reflected light beams received by the photodetector.

Growing community of inventors

Yokosuka, Japan

Toru Hirata