Hitachi, Ltd.

Hitachi High-tech Corporation

Toru Fujimura

Tatsuro Ide

Kosuke Kuwabara

Takayuki Mizuno

Akira Kageyama

Tomohisa Ohtaki

Ryo Hirano

Masaaki Komori

Yasuhiko Nara

Shigehiko Kato

Katsuo Ohki

Yasushi Goto

Kei Takenaka

Juergen Pipper

It is not preferable to use a material other than materials that are used in the related art in order to prevent a section from peeling from a microscope slide. This is because, even if adhesiveness is improved, it is necessary to eliminate influence on processes such as dyeing. An object of the invention is to provide a technique for preventing a section from peeling off without applying an additional material. In the invention, the above-described problem is solved by etching at least a part of a region of a surface of a substrate with reactive ions.

Microscope slide, method for manufacturing microscope slide, observation method, and analysis method

A method for manufacturing a semiconductor device in which probes and the layout of the electrode pads of a test element group (TEG) are associated is provided. As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Thus, it is necessary to associate the probes and the layout of the electrode pad. According to the method, a layout of a TEG electrode pad corresponding to a plurality of probes arranged in a fan shape or probes manufactured by Micro Electro Mechanical Systems (MEMS) technology is provided.

Method for manufacturing semiconductor device

As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Therefore, it is necessary to associate probes and the efficient layout of the electrode pad. The purpose of the present invention is to provide a technique for associating probes and the layout of the electrode pads of a TEG so as to facilitate the evaluation of electrical characteristics. According to an evaluation apparatus for a semiconductor device of the present invention, the above described problems can be solved by providing a plurality of probes arranged in a fan shape or probes manufactured by Micro Electro Mechanical Systems (MEMS) technology.

Evaluation apparatus for semiconductor device

As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Therefore, it is necessary to associate probes and the efficient layout of the electrode pad. The purpose of the present invention is to provide a technique for associating probes and the layout of an electrode pad of a TEG to facilitate the evaluation of electrical characteristics. According to the present invention, the above described problem can be solved by arranging a plurality of probes in a fan shape or manufacturing the probes with micro electro mechanical systems (MEMS) technology.

Probe module and probe

The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.

Cells for biochemical analysis, kit for biochemical analysis, and biochemical analyzer

The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the reflection spectrum.

An object of the present invention is to provide a simple biochemical sensor making use of the light interference effect of an optical film which is capable of measuring binding of biochemical substances at a high throughput. In the present invention, a solution containing samplesis passed through the sensor having probesprovided on an optical film with a refractive index of not less than 1.8 and not greater than 3 on a substrate, and binding of the probesand samplesis detected from the change of intensity of the reflected light. This makes it possible to measure binding of biochemical substances at a high throughput with high precision.

Kit for biochemical sensor and measuring apparatus

A chip having a deaerating function and requiring no bonding or welding for forming a channel, and an apparatus and method for the reaction analysis are provided. The chip contains a first substrate, a second substrate having a liquid inlet and a liquid outlet, and an intermediate member having hydro-phobicity and air permeability and forming a channel between the first and second substrates. It is thereby possible to prevent mixing of air bubbles into the channel.

Chips, and apparatus and method for reaction analysis

A simple and convenient sensor and measuring apparatus utilizing the optical interference effect of an optical thin film capable of measuring the binding between biochemical substances at a high throughput and having alkali resistance. An optical thin film of silicon nitride is disposed on the first surface and the rear surface of a silicon substrate, and the thickness of the silicon nitride film is modified in a direction parallel to the film. A portion of the thin film with increased thickness is used as a sensor upon which a probe is disposed, and over which a sample-containing solution is caused to flow. The binding between the probe and biochemical sample is detected based upon the change of the intensity of reflected light.

Growing community of inventors

Asaka, Japan

Toru Fujimura