Dainippon Screen Mfg. Co., Ltd.

Sokudo Co., Ltd.

Toru Azuma

Yasuhiro Fukumoto

Yasufumi Koyama

Kazuya Akiyama

Mitsuhiro Masuda

In a thermal processing unit, a substrate is held by a local transport hand to be transported between a transfer section and a heating unit, and subjected to a heat processing by the heating unit. Also, the local transport hand is cooled by a cooling plate in the transfer section.

Thermal processing apparatus, thermal processing method, and substrate processing apparatus

Provided is a substrate processing apparatus that can reduce power consumption, while maintaining throughput. In addition to a normal mode in which all units are activated, the apparatus is provided with an energy saving mode that is selectable. When the energy saving mode is selected, only essential units that are requisites for a substrate processing are activated and used in the substrate processing. If it is necessary to increase process efficiency, any additional unit may be activated and used in the processing. During standby, only an essential unit can be activated and the rest is halted, or alternatively, all units may be halted. The transition to the energy saving mode can occur when the standby state continues for a predetermined period of time after the normal mode is selected.

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Kyoto, Japan

Toru Azuma