Asml Netherlands B.v.

Torsten Harzendorf

Marcus Adrianus Van De Kerkhof

Timotheus Franciscus Sengers

Haico Victor Kok

Bearrach Moest

Borgert Kruizinga

Marc Antonius Maria Haast

Manfred Schrenk

Peter Werner Weissbrodt

Manfred Helmut Gustav Wilhelm Johannes Schrenk

Peter Weissbrodt

A sensor for use at substrate level in a high numerical aperture lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The improved coupling elements include a flowing liquid medium disposed between the transparent plate and the sensing element.

Lithographic apparatus and sensor therefor

A sensor for use at substrate level in a high numerical aperature lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The elements include Fresnel lenses, holographic optical elements, inverted Winston Cones, spherical lenses and surface roughening.

Sensor for use in a lithographic apparatus

Growing community of inventors

Stadtroda, Germany

Torsten Harzendorf