Tokyo Electron Limi Ted

Tooru Tokimatu

Akihiro Teramoto

Tokutarou Hayashi

Kazutoshi Ishimaru

Hiroki Harada

Masahiro Abe

A device includes a substrate holding unitconfigured to hold a substrate and be movable in a transversal direction to transfer the substrate from one module to another module; a first detecting unitconfigured to detect a position of the substrate on the substrate holding unitbefore the substrate holding unittransfers the substrate into the another module after receiving the substrate from the one module; second detecting unitsandconfigured to detect a position deviation between a position of the substrate holding unit, which is located at a temporary position set to transfer the substrate into the another module, and the temporary position; and a position determining unitconfigured to determine a transfer position where the substrate is transferred into the another module based on the position of the substrate on the substrate holding unitand the position deviation.

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Koshi, Japan

Tooru Tokimatu