Taiyo Nippon Sanso Corporation

Nippon Sanso Corporation

Tooru Nagasaka

Akihiro Nakamura

Masato Kawai

Tatsushi Urakami

Shigeru Hayashida

A gas separation method is provided in which, when separating a first component and a second component from a mixed gas containing a plurality of components by using a pressure swing adsorption method, these components can be efficiently recovered and cost reduction can be achieved. Between an adsorption step and a regeneration process step, which use a first adsorption column containing a first adsorbent on which the first component is less readily adsorbable and the second component is absorbable, and a second adsorption column containing a second adsorbent on which the first component is readily adsorbable and the second component is less readily adsorbable, an equalization depressurization step and an equalization pressurization process step, in which the pressure of the first and second adsorption columns is equalized, is carried out.

Gas separating method

A gas separation method and apparatus that recovers efficiently principal gas components from a feed gas that includes a plurality of components, and enables supplying the product gases continuously at a stable flow rate and component concentration. A first separation step using a first adsorption column and a second separation step using a second adsorption column are provided, a circulating feed gas, consisting of the recovered exhaust gases discharged in each of the steps and the feed gas, is used as a gas to be separated. The outflow rate and component concentration of a second gas product are maintained constant by controlling the outflow rate of the first gas product.

Gas separation method and device

The gas separation and purification process can recover efficiently a valuable gas such as krypton and xenon to be used as an atmospheric gas in a semiconductor manufacturing equipment etc. by means of PSA process. In the process for separating a valuable gas in the form of purified product from a mixed gas, used as a raw gas, containing the valuable gas by means of pressure swing adsorption process, the valuable gas is separated and purified by using as the pressure swing adsorption process a combination of equilibrium pressure swing adsorption process for separating gas components based on the difference in equilibrium adsorption and rate-dependent pressure swing adsorption process for separating the gas components based on the difference in adsorption rates.

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Tsuchiura, Japan

Tooru Nagasaka