Heraeus Quarzglas Gmbh

Shin-etsu Quartz Products Ltd.

Tooru Ikeda

Hiroyuki Watanabe

Hiroshi Kimura

Kazuo Asajima

In a quartz glass crucible obtained by heating and fusing a rotating layer (3) charged with a powder of silicon dioxide, impurity elements are controlled so that copper, chromium, and nickel each amount to 0.5 ppb or less, iron amounts to 120 ppb or less, and sodium amounts to 20 ppb or less. The silicon dioxide powder is supplied to a rotatable mold (1) having an open top, thereby forming a layer (3) charged with silicon dioxide along the inner peripheral wall of the mold. The layer (3) is internally heated and fused while covering the open top with a lid (5) having two or more holes (6,7), and the mold (1) is ventilated to discharge the high temperature gases through the holes (6,7).

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Vancouver, WA, United States of America

Tooru Ikeda