Average Co-Inventor Count = 8.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Novellus Systems Incorporated (2 from 993 patents)
2 patents:
1. 8217513 - Remote plasma processing of interface surfaces
2. 8084339 - Remote plasma processing of interface surfaces