California Institute of Technology

Siwave, Inc.

Siimpel Corporation

Digitaloptics Corporation Mems

The Boeing Company

The United States of America As Represented by the Administrator of the

Hughes Electronics Corporation

Silmpel Corporation

Tony Kai Tang

Roman Gutierrez

Robert J Calvet

Jing Xu

Eric R Fossum

William J Kaiser

A Dorian Challoner

Damien Craig Rodger

Kirill V Shcheglov

Christopher Bryan Stell

Vatche Vorperian

Donald R Cargille

Darrell Harrington

Jaroslava Z Wilcox

Robert John Calvet

Kirill Shcheglov

Jaroslava Wilcox

Shawn Maloney

Randall K Bartman

Cathleen Jones

Roman C Gutierrez

A device can have an optical component having at least one alignment/attachment feature and a MEMS structure having a complimentary alignment/attachment feature for each alignment/attachment feature of the optical component. Each alignment/attachment feature of the optical component can mate with a corresponding alignment/attachment of the MEMS structure to align and/or attach the optical component to the MEMS structure. Thus, improved combinations of optical components and MEMS devices can be provided.

Wafer scale optics

A lens barrel assembly for a camera is disclosed. The lens barrel assembly comprises a lens barrel, at least one optical element disposed within the lens barrel, and an actuator configured to move the optical element. The actuator can be disposed entirely or partially within the lens barrel. The actuator can be a MEMS actuator, such as a MEMS actuator that is formed at least partially of silicon. The optical element can be a lens.

Lens barrel assembly for a camera

A lens barren assembly for a camera is disclosed. The lens barrel assembly comprises a lens barrel, at least one optical element disposed within the lens barrel, and an actuator configured to move the optical element. The actuator can be disposed entirely or partially within the lens barrel. The actuator can be a MEMS actuator, such as a MEMS actuator that is formed at least partially of silicon. The optical element can be a lens.

A method and system for enhancing the resolution of a camera are disclosed. For example, a single lens can be placed at a predetermined position and the position of a lens assembly can be adjusted so as to enhance the resolution of the camera. The single lens can then be moved so as to effect focusing of the camera while the position of the lens assembly tends to maintain enhanced resolution thereof.

Resolution adjustment for miniature camera

An improved lens barrel and related methods are provided. For example, in accordance with an embodiment of the present invention, a lens barrel includes a housing comprising a first section having a first diameter and a second section having a second diameter. A first lens element having a diameter approximately equal to the first diameter of the first section is enclosed by the first section of the housing. A second lens element is provided having a diameter approximately equal to the second diameter of the second section.

Lens barrel

A micro-machined MEMS resonator gyroscope and accelerometer is fabricated from an epilayer semiconductor wafer to incorporate a substantially planar, H-shaped resonator mass suspended from a support plate by two opposed elongated springs that couple to the relatively short crossbar member of the H. The masses are harmonically oscillated relative to the support plate and a baseplate portion, and two orthogonal modes of the structure corresponding to the two nearly degenerate fundamental torsional modes thereof are used for sensing angular rate about one axis, and linear acceleration along two axes, of the sensor. The H-shaped mass advantageously incorporates a relatively high length-to-width aspect ratio, and in one embodiment, the springs may advantageously incorporate either a square cross-section, such that the structure can be tuned to substantially match the fundamental frequencies of the two resonance modes of the structure by removing, e.g., by an etching process, a small amount of material from the upper surfaces of the springs.

Micro-electromechanical system inertial sensor

In accordance with an embodiment of the present invention, an electrostatic actuator has a base having a plurality of base pillars formed thereon and has a stage having a plurality of stage pillars formed thereon. The controlled application of voltage signals to the base pillars and/or the stage pillars results in electrostatic force that effects movement of the stage with respect to the base.

MEMS digital linear actuator

A range/speed finder can be incorporated into a personal electronic device. In one example, a personal electronic device includes an automatic focus system adapted to focus an image of an object and a processor in communication with the automatic focus system adapted to detect a distance of the object using the automatic focus system. The processor can be adapted to detect a speed of the object and/or a dimension of the object using the automatic focus system. Methods and systems for determining a distance, a dimension, and/or a speed of the object relative to the personal electronic device are also provided.

Range and speed finder

A micro-gyroscope () having closed loop output operation by a control voltage (V), that is demodulated by a drive axis (x-axis) signal Vof the sense electrodes (S, S), providing Coriolis torque rebalance to prevent displacement of the micro-gyroscope () on the output axis (y-axis) V&#x2dc;0. Closed loop drive axis torque, Vmaintains a constant drive axis amplitude signal, V. The present invention provides independent alignment and tuning of the micro-gyroscope by using separate electrodes and electrostatic bias voltages to adjust alignment and tuning. A quadrature amplitude signal, or cross-axis transfer function peak amplitude is used to detect misalignment that is corrected to zero by an electrostatic bias voltage adjustment. The cross-axis transfer function is either V/Vor V/V. A quadrature signal noise level, or difference in natural frequencies estimated from measurements of the transfer functions is used to detect residual mistuning, that is corrected to zero by a second electrostatic bias voltage adjustment.

Cloverleaf microgyroscope with electrostatic alignment and tuning

Micromachined passive alignment assemblies and methods of using and making the same are provided. The alignment assemblies are used to align at least one optical element. The alignment assemblies may be configured with kinematic, pseudo-kinematic, redundant or degenerate support structures. One alignment assembly comprises a base and a payload, which supports at least one optical element. The payload may be coupled to the base via connecting structures. The base, the payload and/or the connecting structures may have internal flexure assemblies for preloading a connection, thermal compensation and/or strain isolation.

Base, payload and connecting structure and methods of making the same

A pivotable optical element that may be fully deflected in a plurality of positions is disclosed. The fully deflected positions of the optical element may be defined against linear segments on a platform or against linear segments on the optical element.

Snap down pivoting optical element

A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which is the rotation rate sensing element. The vertical post is formed from the same silicon wafers as the rest of the microgyroscope. A first portion of the vertical post and the clover-leaf structure are made from a first silicon wafer. A second portion of the vertical post and the baseplate are made from a second silicon wafer. The two portions are then bonded together to from the clover-leaf gyroscope with an integrated post structure.

Growing community of inventors

Glendale, CA, United States of America

Tony Kai Tang