Applied Materials, Inc.

Tony Davis

Michael Johnson

Kommisetti Subrahmanyam

Manjunath Yedatore

Scott Singlevich

Shawn B Smith

John R Swyers

William R Clements, Iii

Brian P Grigsby

Hung J Pham

Donn Turner

Methods and systems for accurate arc detection in semiconductor manufacturing tools are disclosed. Such methods and systems provide real-time arc detection and near real-time notification for corrective actions during a semiconductor manufacturing process. Such methods and systems utilize data with high sample rate and wavelet analysis to provide for more accurate arc detection, which leads to more effective and cost efficient semiconductor manufacturing operations.

System to detect wafer arcing in semiconductor manufacturing equipment

Method to detect wafer arcing in semiconductor manufacturing equipment

A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.

Predictive maintenance for third party support equipment

A method for data mining information obtained in an integrated circuit fabrication factory ('fab') that includes steps of: (a) gathering data from the fab from one or more of systems, tools, and databases that produce data in the fab or collect data from the fab; (b) formatting the data and storing the formatted data in a source database; (c) extracting portions of the data for use in data mining in accordance with a user specified configuration file; (d) data mining the extracted portions of data in response to a user specified analysis configuration file; (e) storing results of data mining in a results database; and (f) providing access to the results.

Method and apparatus for analyzing manufacturing data

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Austin, TX, United States of America

Tony Davis