Globalfoundries Inc.

Tong Qing Chen

Ravi Prakash Srivastava

Catherine B Labelle

Vikrant Kumar Chauhan

Sohan Singh Mehta

Mark Kelling

An illustrative test structure is disclosed herein that includes a plurality of first line features and a plurality of second line features. In this embodiment, each of the second line features have first and second opposing ends and the first and second line features are arranged in a grating pattern such that the first ends of the first line features are aligned to define a first side of the grating structure and the second ends of the first features are aligned to define a second side of the grating structure that is opposite the first side of the grating structure. The first end of the second line features has a first end that extends beyond the first side of the grating structure while the second end of the second line features has a first end that extends beyond the second side of the grating structure.

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Fishkill, NY, United States of America

Tong Qing Chen