Tokyo Electron Limited

Tomoyuki Yumoto

Takashi Sasa

Hideo Shite

Daisuke Ishimaru

Takahiro Okubo

Tomohiko Muta

Kazuhiko Kimura

A stay of a liquid can be suppressed. A pumpincludes a tube, having elasticity, in which a liquid as a target to be delivered flows; a tube housingwhich covers an outside of the tubeand keeps a gas in an inner space V between an outer surface of the tubeand the tube housing; and an electropneumatic regulator RE configured to supply the gas into the inner space V and discharge the gas from the inner space V.

Pump, pump device, and liquid supply system

A treatment solution supply method includes: a degassed treatment solution generating step of degassing a treatment solution by a degassing mechanism to generate a degassed treatment solution; a treatment solution storing step of storing the degassed treatment solution in a container; a filter solution-passing step of bringing a downstream side from a filter connected to a downstream side from the container via a treatment solution supply pipe to a negative pressure with respect to a pressure in the container to pass the treatment solution in the container through the filter; and a negative pressure maintaining step of maintaining a state in which the downstream side from the filter is brought to the negative pressure, for a predetermined period, after stopping supply of the treatment solution from the container to the filter.

Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatus

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Koshi, Japan

Tomoyuki Yumoto