Ulvac, Inc.

Tomoyuki Yoshihama

Harunori Ushikawa

Masamichi Harada

Satoru Toyoda

Kazumasa Horita

Junichi Hamaguchi

Shuji Kodaira

Koukichi Kamada

Shigeo Nakanishi

A film formation apparatus includes: a chamber having an inner space in which both a body to be processed and a target are disposed so that the body to be processed and the target are opposed to each other, a first magnetic field generation section generating a magnetic field in the inner space to which the target is exposed; a second magnetic field generation section generating a perpendicular magnetic field so as to allow perpendicular magnetic lines of force thereof to pass between the target the body to be processed; and a third magnetic field generation section disposed at upstream side of the target as seen from the second magnetic field generation section.

Film formation apparatus

Growing community of inventors

Susono, Japan

Tomoyuki Yoshihama