Japan Electronic Materials Corporation

Japan Electronics Material Corporation

Tomoyuki Takeda

Teppei Kimura

Atsuo Urata

Noriyuki Fukushima

Naoki Arita

The present invention intends to suppress a contact probe from interfering with a guide plate to produce shavings. The present invention has stacked structure that sandwiches an intermediate metallic layerbetween outer metallic layersand, and includes: a contact partthat is brought into abutting with a test object; an elastic deformation partthat is elastically deformed so as to be curved in a predetermine direction of curvature N by compression force in the longer direction; and a fore end partthat is formed between the contact partand the elastic deformation partand supported by a through-holeof a guide plateso as to make the contact partmovable in the longer direction, in which side surfaces of the fore end partformed in the direction of curvature N and a direction N' opposite to the N of the elastic deformation partare configured to include the three metallic layersto, and on the side surfaces, the intermediate metallic layeris configured to protrude relative to the outer metallic layersand

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Hyogo, Japan

Tomoyuki Takeda