Showa Denko K.k.

Tomoyuki Noguchi

Masato Saito

Katsuo Hara

Yushi Kinoshita

Daisuke Muto

Kenji Momose

Yoshiaki Kageshima

Provided is an epitaxial wafer manufacturing device () that deposits and grows epitaxial layers on the surfaces of wafers W while supplying a raw material gas to a chamber, wherein a shield (), arranged in close proximity to the lower surface of a top plate () so as to prevent deposits from being deposited on the lower surface of the top plate (), is removably attached inside the chamber, has an opening () in the central portion thereof that forces a gas inlet () to face the inside of a reaction space K, and has a structure in which it is concentrically divided into a plurality of ring plates (), () and () around the opening ().

Epitaxial wafer manufacturing device and manufacturing method

The present invention provides a device and a method for producing a magnetic recording medium having a lubricant membrane with a uniform thickness on a surface. The device for producing the magnetic recording medium includes: a hanger device that is inserted into the central hole of the magnetic recording medium and supports the magnetic recording medium in a hanging state; and a raising and lowering device that raises and lowers one of the hanging device and an immersion tank with respect to the other thereof. The hanger device includes a support plate of which an upper end comes into contact with an inner circumference of the magnetic recording medium and a liquid-cutting plate which extends from a lower end of the support plate and is distant by a space along the inner circumference of the magnetic recording medium from the inner circumference of the magnetic recording medium.

Method for producing and device for producing magnetic recording medium

Provided is a magnetic recording medium manufacturing apparatus capable of forming a lubricant film with a uniform thickness on the surface of a magnetic recording medium. The magnetic recording medium manufacturing apparatus includes a hanger mechanism () that is inserted into a central hole () of a magnetic recording medium () and supports the magnetic recording medium () in a suspended state and a lifting mechanism () that lifts and lowers one of the hanger mechanism () and the dip tank () relative to the other. The hanger mechanism () includes supporting plates () that have upper ends coming into contact with an inner circumferential portion of the magnetic recording medium () and baffle plates () that have upper ends disposed below the upper ends of the supporting plates () such that a gap is formed between the upper end of the baffle plate and the inner circumferential portion of the magnetic recording medium () and are provided so as to face the supporting plates ().

Growing community of inventors

Kawasaki, Japan

Tomoyuki Noguchi