Tomoegawa Paper Co., Inc.

Sony Manufacturing Systems Corporation

Tomoyuki Nakada

Masaaki Kusumi

Yasuharu Mizumoto

Mitsuru Ohno

Michio Okano

Hideki Nakamori

Yoshihiko Ohkawara

Toshiaki Suzuki

Touru Sumiya

Akitaka Tsunogae

Teruyuki Miura

In a magnetic sensor () including a substrate () having a magnetism-sensitive element () formed thereon, a hard membrane () is formed on the outermost surface, an organic film () to relieve the stress caused by the hard membrane () is formed under the hard membrane (), and an inorganic film () to relieve the stress caused by the organic film () is formed between the organic film () and magnetism-sensitive element (). Also, an intermediate film formed from an element having a large force of bonding to carbon may be formed between the organic film () and hard membrane (). Thus, the magnetic sensor (MR sensor, for example) can be protected against an external shock.

Magnetic sensor and position detector

The present invention provides a thin and flexible electromagnetic wave shielding material having excellent electromagnetic wave shielding properties and mainly usable in electronic equipment. The electromagnetic wave shielding sheet according to the present invention is composed of a porous sheet containing one or plural kinds of metallic fibers, or a sintered porous sheet obtained by sintering the above porous sheet. The sheet has a thickness of 10 to 100 &mgr;m. a porosity of 70 to 95% and Gurley stiffness of 5 to 50 mg. The sheet can be made by, for example, using stainless steel fiber as the metallic fiber in accordance with a wet paper making process.

Electromagnetic wave shielding sheet

Growing community of inventors

Shizuoka, Japan

Tomoyuki Nakada