Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,346 patents)
2 patents:
1. 8172949 - Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program
2. 7756599 - Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program