Average Co-Inventor Count = 3.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Nec Corporation (2 from 35,734 patents)
2. Sumitomo Heavy Industries, Ltd. (2 from 1,180 patents)
3. Anelva Corporation (2 from 256 patents)
2 patents:
1. 7312418 - Semiconductor thin film forming system
2. 6861614 - S system for the formation of a silicon thin film and a semiconductor-insulating film interface