Mitsubishi Heavy Industries Limited

Tomoyoshi Baba

Kohei Kawazoe

Takashi Ishide

Kazutaka Uda

Toshiyuki Yamada

Tatsuyuki Nishimiya

Kiyotoshi Nishimura

Sachiko Nakao

Katsutoshi Ochiai

Provided is a photoelectric conversion device fabrication method in which current leakage from an intermediate contact layer via an intermediate-contact-layer separating groove is prevented as much as possible. Included are a step of film-forming a top layer having amorphous silicon as a main component; a step of film-forming, on the top layer, an intermediate contact layer electrically and optically connected thereto; a step of separating the intermediate contact layer by removing the intermediate contact layer by irradiating it with a pulsed laser, forming an intermediate-contact-layer separating groove that reaches the top layer; and a step of film-forming, on the intermediate contact layer and inside the intermediate-contact-layer separating groove, a bottom layer electrically and optically connected thereto and having microcrystalline silicon as a main component. A pulsed laser having a pulse width of 10 ps to 750 ps, inclusive, is used as the pulsed laser for separating the intermediate contact layer.

Photoelectric conversion device fabrication method and photoelectric conversion device

Provided is a method for manufacturing a photoelectric-conversion-device capable of controlling the groove depth of a processed groove to a desired value. The method for manufacturing a photoelectric conversion device () includes a groove forming step of irradiating an intermediate-contact-layer separating groove () constituting a photoelectric conversion device () with a picosecond laser and of moving the picosecond laser relative to the intermediate-contact-layer separating groove (), thereby forming a processed groove () in a predetermined scanning direction. In the groove forming step, interference fringes arranged in parallel in one direction are formed in an irradiated area corresponding to a beam diameter of the picosecond laser, and the picosecond laser is relatively moved such that the interference fringes are joined in the scanning direction.

Method for manufacturing photoelectric-conversion-device, device for photoelectric-conversion-device manufacturing device, and photoelectric conversion device

A desired search area is efficiently monitored. A surveillance device that is installed in a flying aircraft in the sky and that monitors the situation at the sea surface from the sky, including a light-transmitting portion that is provided with a light source and that radiates a plurality of slit-like beams from the sky toward a search area at the sea surface, a light-receiving portion that receives a plurality of reflected beams that have been reflected at an object at the sea surface, and a processor that determines whether or not the object at the sea surface that has reflected the beams is a target object from information about the reflected beams obtained by the light-receiving portion.

Surveillance device and surveillance method

Growing community of inventors

Nagasaki, Japan

Tomoyoshi Baba