Nissin Electric Co., Ltd.

Nippon Itf, Inc

Tomoyasu Matsuno

Nobuo Nagai

Naoto Okazaki

Makoto Nakaya

Satoru Yuasa

Shinji Narahara

Hiroshi Ishizuka

Ken Yoshihara

Yoshio Tamura

Provided is an arc evaporation source for melting and evaporating a cathode material by arc discharge for film formation on a surface of a substrate, and including a cathode formed in a substantially disc shape and a magnetic field generating apparatus, disposed at a back side of the cathode. The magnetic field generating apparatus generates a magnetic field which forms magnetic lines that form an acute angle with respect to a substrate direction at an outer circumferential surface of the cathode, magnetic lines that are substantially perpendicular to the discharge surface at an outermost circumference part of the discharge surface of the cathode, and magnetic lines that form an acute angle with respect to a center direction of the cathode at a region towards the outer circumferential surface of the discharge surface of the cathode, by at least one permanent magnet disposed at the back side of the cathode.

Arc evaporation source

A holder driving device has: a holder holding a substrate, a shaft supporting the holder, a driver for driving the shaft reciprocatingly and linearly in the direction along the shaft, a bearing unit having mechanical linear motion bearings for supporting the shaft thereon and having one or more stages of exhaust chambers surrounding the shaft; a vacuum pump for vacuum-pumping the exhaust chambers of the bearing unit; and a gas replacement mechanism for supplying dry gas, the humidity of which is lower than that of at least the surrounding atmosphere and the pressure of which is positive, from the outside of the bearing unit to at least the neighborhood of an atmosphere-side entrance portion of a gap between an end portion of the bearing unit one the side opposite to the vacuum vessel and the shaft passing the end portion, so as to replace the atmosphere near the entrance portion by the dry gas.

Holder driving unit

Growing community of inventors

Kyoto, Japan

Tomoyasu Matsuno