Horiba, Ltd.

Tomoya Shimizu

Kusuo Ueno

Makoto Nagura

Hiroshi Tateno

Kazuma Aoyagi

Akihiro Minami

A sample dispersing device contains a container inside of which a dispersal chamber where a power sample is dispersed is formed, and an introducing mechanism that introduces a gas containing the powder sample from the outside of the container into the dispersal chamber based on a pressure difference between the inside and the outside of the container. The introducing mechanism contains an introduction pipe where the gas containing the powder sample flows, and several restrictors arranged in the introduction pipe.

Sample dispersing device

A sample dispersion device capable of preparing a measurement sample in the most suitable dispersion state without repreparing the measurement sample many times, is one that by introducing sample particles into a container and injecting the sample particles in the container using a pressure difference, disperses sample particles onto a holding member provided in a container to make the holding member hold the sample particles. The holding member has a holding surface made to hold the sample particles; and the holding surface has multiple portions having mutually different tilt angles.

Sample dispersion device and sample dispersion method

A sample is analyzed efficiently with combining a structural defect detection and a physical information measurement so as to determine whether a structural defect is the defect that degrades the device performance or not, not only by detecting the structural defect exists in the sample, but also by measuring a physical information that occurs due to the structural defect. It comprises a structural defect detection devicethat detect a structural defect KK of a sample W, a structural defect setting device that sets up the structural defect KK for which a physical information is to be measured based on the defect information among the structural defect KK detected by the structural defect detection device, and a physical information measurement devicethat measures the physical information of the defect region KR including the structural defect set up by the structural defect setting device.

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Kyoto, Japan

Tomoya Shimizu