Toyota Jidosha Kabushiki Kaisha

Denso Corporation

Mirise Technologies Corporation

Nisshinbo Micro Devices Inc.

Tomoya Joke

Hideo Yamada

Tetsuya Enomoto

Hiroyuki Kuchiji

Naoki Masumoto

Takashi Kakefuda

Yuki Ohara

Takahide Usui

Shuji Katakami

An electroacoustic transducer includes a vibrating portion, a slit and an elastic film. The vibrating portion has a fixed end portion and a free end portion, and extends as a cantilever from the fixed end portion toward the free end portion along an extending direction orthogonal to a directivity axis to vibrate in a manner that the free end portion moves along the directivity axis. The slit is formed at two ends of the vibrating portion in a width direction orthogonal to the directivity axis and orthogonal to the extending direction. The elastic film is provided to close the slit in an axial direction that is aligned with the directivity axis. The slit includes a wide portion provided on a free end side and a narrow portion narrower than the wide portion. The elastic film is provided to close the wide portion while not closing the narrow portion.

Electroacoustic transducer

A microelectromechanical systems device includes a vibrator and a reinforcing film. The vibrator includes a piezoelectric element configured to convert pressure to an electrical signal. The reinforcing film is configured to reinforce strength of the vibrator. The vibrator further has a groove at which a portion of the reinforcing film is disposed.

Microelectromechanical systems device

Growing community of inventors

Nisshin, Japan

Tomoya Joke