Aisin Seiki Kabushiki Kaisha

Riken Corporation

Tomoya Hirosumi

Masayoshi Tonouchi

Makoto Yoshida

Hideyuki Ohtake

Kodo Kawase

Ryoichi Fukusawa

It comprises a voltage-application apparatusfor applying a predetermined voltage to a semiconductor device, and holding it therein; a laser apparatusfor generating a laser beamhaving a predetermined wavelength; an irradiation apparatusfor irradiating the laser beamonto the two-dimensional circuit of the semiconductor device, which is held in the applied state, so as to scan it two-dimensionally; an electromagnetic-wave detection/conversion apparatusfor detecting an electromagnetic wave, which is radiated from the laser-beam irradiation position, and converting the electromagnetic wave into an electric-field signal, which changes temporally; and phase-judgement means, to which the temporally-changing electric-field signal output from the detection/conversion apparatusis input, for judging the phase of the electric-field signal.

Electric-field distribution measurement method and apparatus for semiconductor device

An apparatus that inspects wire breaking of a semiconductor integrated circuit includes a voltage applying device (), a light pulse source (), a scanning device (), an electromagnetic wave detection device (), and a wire breaking detection device (). The voltage applying device () maintains a semiconductor integrated circuit in a state where a predetermined voltage is being applied thereto. The light pulse source () generates an ultrashort light pulse (). The scanning device () two-dimensionally scans and irradiates the two-dimensional circuit of the semiconductor integrated circuit by using the ultrashort light pulse (). The electromagnetic wave detection device () detects an electromagnetic wave () radiated from a position irradiated with the ultrashort light pulse on the semiconductor integrated circuit. The wire breaking detection device () detects wire breaking of the irradiated position based on presence and absence or intensity of the electromagnetic wave.

Method and apparatus for inspecting wire breaking of integrated circuit

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Anjo, Japan

Tomoya Hirosumi