Hitachi, Ltd.

Hitachi-high-technologies Corporation

Life Technologies Corporation

Tomonari Morioka

Yasushi Shimizu

Toshiaki Kita

Yoshiyuki Okishima

Kiyoshi Tsukada

Ryoji Inaba

Seiichi Ugai

Takayasu Furukawa

Akihiro Suzuki

Tomohiro Shoji

Masaya Kojima

Daizo Tokinaga

Shuhei Yamamoto

Masao Fukunaga

Hiroshi Mitsumaki

Hiroyuki Tanaka

Ryo Miyake

Takao Terayama

Akira Koide

Noriyuki Shimoda

Syouzou Kasai

Masahito Ito

Hiroshi Akiyama

Motohiro Yamazaki

Yasuhiro Yoshimura

Yasuhiko Sasaki

Yoshihiro Nagaoka

Naruo Watanabe

Takashi Gomi

Hideki Fukushima

Miho Ozawa

Syozo Kasai

Masanori Gunji

Yasuhiko Ishida

Yoshinori Ookoshi

Tsukasa Ohira

Takehiko Shibasaki

Syouzo Kasai

Ryouji Inaba

Provided are a contamination inspection method and a contamination inspection device for highly accurately detecting a defect in a wafer, a liquid crystal substrate and media or the like including patterns, for example, a semiconductor device or the like. The first aspect of the present invention is a contamination inspection device comprising: an irradiation optical system for irradiating lights on the inspection target substrate; and a spatial filter for shading diffracted lights form the inspection target substrate. Herein, the spatial filter comprises: a plurality of light shading materials; a control member for changing at least one of parameters selected from a shape, an angle and an interval with respect to the light shading material, and a control unit for controlling the control members.

Contamination inspection method and contamination inspection device

A capillary array includes a light detection portion, a sample supply portion, a buffer solution supply portion and a voltage application portion which are necessary functions for electrophoresis, thereby, when assembling the capillary array into an electrophoresis apparatus, the same can be immediately used. Accordingly, a capillary array is provided which can be easily incorporated into an electrophoresis apparatus.

Capillary array

The flow rate of a solvent is reduced as a separation column and the separation performance is improved even under high-pressure conditions. There is provided a separation column including a monolith rod into which a sample and a mobile phase flow, the separation column comprising: a coating material coated on the outer circumference of a monolith rod; a support member into which the monolith rod coated with the coating material is inserted, and a rod fixing material fitted into or filled a gap between the coating material and the support member; wherein the upper end face of the rod fixing material is sealed, the upper end face being the inflow-side end when the separation column is assembled.

Separation column and liquid chromatograph using the same

In a case where the temperature of capillaries cannot be controlled rapidly in accordance with the change of the amount of heat generated from the capillaries, the phoretic speed of the sample is not controlled constant to lower the analyzing performance for the sample. This invention intends to stabilize the electrophoretic speed. The surface of a substrate on which a plurality of capillaries are arranged is in contact with a member capable of temperature control thereby controlling the temperature of the capillaries. Since a member capable of controlling the temperature and the capillaries are in direct contact with each other according to the invention, the temperature of the capillary can be controlled rapidly at a high accuracy, so that electrophoretic speed is stabilized.

Capillary array and capillary electrophoresis apparatus

A capillary array includes multiple capillaries and two holding substrates for arranging the aforementioned multiple capillaries in a substantially plane surface by sandwiching at least some of these capillaries mutually. One of the holding substrates has a detection window for transmitting the detected light emitted by a test sample by irradiation of light. Especially, this detection window includes multiple light transmission areas provided to correspond to each capillary to transmit the detected light, and light cut-off areas provided between these light transmission areas to cut off the detected light. These light cut-off areas cut off light reflected from the surface of capillaries and hence improve the SN ratio, thereby ensuring high-precision detection.

Capillary array unit and electrophoresis based thereon

Provided is a liquid feed apparatus for feeding liquid by operating a diaphragm at a high frequency, in which an inlet valve and an outlet valve are integrally incorporated with a liquid feed chamber, the positions of the valve are shifted into peripheral parts of the liquid feed chamber so as to allow fluid to smoothly flow from the inlet to the outlet in order to prevent air bubbles from causing pressure fluctuation during liquid feed, from remaining in the liquid feed chamber. Further, the valve has a center beam structure in which a protrusion having a height greater than several micron meters, is formed in the seat part of the valve so as to deform a center beam for pressurizing the valve in order to enhance the shut-off ability of the valve, and the center beam has a small surface area in the direction of displacement of the valve.

Liquid feed apparatus and automatic analyzing apparatus

A multi-focus capillary array that can reduce crosstalk and a capillary array photodetector are provided. On a substrateon which a plurality of capillaries are aligned, a perforationis formed in at least a part of an area in the rear of the capillaries when the capillary array is viewed from the photodetector.

Capillary array and capillary array photodetector

A capillary array comprising multiple capillaries and two holding substrates for arranging the aforementioned multiple capillaries in a substantially plane surface by sandwiching at least some of these capillaries mutually. One of the holding substrates has a detection window for transmitting the detected light emitted by a test sample by irradiation of light. Especially, this detection window comprises multiple light transmission areas provided to correspond to each capillary to transmit the detected light, and light cut-off areas provided between these light transmission areas to cut off the detected light. These light cut-off areas cut off light reflected from the surface of capillaries and hence improve the SN ratio, thereby ensuring high-precision detection.

Capillary array and electrophoresis apparatus

The present invention easies a connection between electrodes of a capillary array device and a connection plate for supplying a high voltage to the electrodes. According to the present invention, a connection plateand hollow electrodesare connected without solder but via a spring force. Alternatively, the hollow electrodescan be connected to the connection plateby utilizing volume elasticity of the connection plate.

Capillary array device

The structure of a capillary head section is made such that the liquid contacting surfaces of a capillary holder, a capillary, and an adhesive form a plane surface, and this shared liquid contacting surface is made a mirror surface with a surface roughness of 3.2 s or less. In the shared liquid contacting surface, the ratio of the total area of the capillaries to the internal diameter area of the capillary holder is made 60 to 73%.

A micro pump is made compact and can prevent members constituting the micro pump from being chemically reacted with a working fluid, and a method of producing the same. After each of substrates constituting the micro pump is formed by a member containing a silicone as a main composition and a plurality of metal membranes are formed on a whole of a bonding surface of each of the substrates so as to form bonding surfaces, the bonding surfaces are cleaned, and the bonding surfaces are opposed to each other under a vacuum condition, overlapped, heated and pressed so as to be bonded. The valve portion has a beam and a protrusion for sealing as provided in the valve side, whereby a pressure applied to the protrusion becomes smaller than the bonding pressure.

Micro pump and method of producing the same

Growing community of inventors

Hitachinaka, Japan

Tomonari Morioka