Kobe Steel, Ltd.

Kabushiki Kaisha Kobe Seiko Sho

Nihon Shinku Gijutsu Kabushiki Kaisha

Tomomitsu Nakai

Makoto Yoneda

Katsumi Watanabe

Takao Fujikawa

Shigeo Kofune

Takahiko Ishii

Yoshihiko Sakashita

Itaru Masuoka

Yutaka Narukawa

Takeshi Kanda

Takeo Nishimoto

Masahiko Mitsuda

Akinori Maegawa

A piston axial force information detection unit () detects piston axial force information pertaining to an axial force applied to a piston body (). A friction information storage unit () stores friction information pertaining to a frictional force between a piston seal () and a pressure vessel () when the piston body () moves relative to the pressure vessel (). A drive control unit () controls a drive device () on the basis of the piston axial force information and the friction information. In a holding stroke for controlling the pressure inside the pressure vessel () so as to be constantly held, the drive control unit () controls the drive device () so that the piston body () reciprocates with respect to the pressure vessel ().

Pressing device

Provided is a hot isostatic pressing (HIP) device that improves the heat uniformity of a hot zone during a pressurization process of an object being processed. This HIP device () is provided with: an outer casing () having an open outer opening part (H); an inner casing () having an open inn opening part (H); a heat-insulating body (R) disposed between the outer casing () and the inner casing (); a gas flow generation part (); and a plurality of first gas conduits (), A hot zone (P) in which a pressurization process is performed is formed inside the inner casing (). During the pressurization process, a low-temperature pressurization medium gas which has been generated by the gas flow generation part () and has passed through the first gas conduits () moves upward in an inner flow passage (L) between the casings, and then flows into the hot zone (P) from the inner opening part (H), Even when the pressurization medium gas leaks from the vicinity of a bottom all part () and flows into the hot zone (P), the heat uniformity of the hot zone (P) is maintained.

Hot isostatic pressing device

Provided is a hot isostatic pressing (HIP) device () that can efficiently cool a hot zone during HIP processing while restraining temperatures in the lower part of a high-pressure container. This HIP device () is provided with the following: gas-impermeable casings () that surround an object to be processed (W); a heating unit () that is disposed inside these casings and forms a hot zone around the object to be processed (W); a high-pressure container (); and a cooling unit that guides a pressure-medium gas cooled on the outside of the casings into the hot zone to cool the hot zone. The cooling unit comprises the following: a gas introduction unit that introduces the pressure-medium gas that has been cooled on the outside of the casings () into the hot zone; and a cooling promotion unit () that cools the pressure medium gas by causing the pressure-medium gas that has been cooled on the outside of the casings to exchange heat with a base () of the high-pressure container ().

Provided is a hot isostatic pressing device (HIP) () that enables prompt cooling in a processing chamber. The HIP device () is provided with the following: gas impermeable casings (); a heating unit (); a high-pressure container (); a heat accumulator () provided below a processing chamber; and a cooling promotion flow path (). The casings () are disposed so as to form the following: a first circulation flow () in which a pressure medium gas passes through an inner flow path () and an outer flow path () and then returns to the inner flow path (); and a second circulation flow () in which the pressure medium gas which has branched off from the first circulation flow () performs heat exchange with an object-of-processing (W) in the processing chamber and then is fed back to the first circulation flow (). In the cooling promotion flow path (), the pressure medium gas that is in the second circulation flow () and that has performed heat exchange with the object-of-processing (W) is guided to the heat accumulator () and cooled by the heat accumulator () before the pressure medium gas merges with the first circulation flow ().

A hot isostatic pressing method is disclosed wherein workpieces are accommodated within a high pressure vessel and the interior of the high pressure vessel is filled with an inert gas of a high temperature and a high pressure to treat the workpieces. The method includes a cooling step which is performed after maintaining the interior of the high pressure vessel at a high temperature and a high pressure for a predetermined time and in which a liquid inert gas is fed into the high pressure vessel. According to this method it is possible to shorten the cycle time of an HIP apparatus.

Hot isostatic pressing method and apparatus

A hot isotropic pressure device including: a casing disposed inside a high-pressure container; a heating unit provided inside the casing and forms a hot zone around the treatment material, in which an isotropic pressure treatment is performed on the treatment material using a pressure medium gas. A cooling unit is provided to cool the hot zone by guiding the pressure medium gas, cooled while guided from the upper side toward the lower side at the outside of the casing, into the hot zone. The cooling unit includes a gas introducing unit which guides the pressure medium gas cooled at the outside of the casing from the lower portion of the high-pressure container to the upper portion of the hot zone without any intersection with the pressure medium gas inside the hot zone and introduces the pressure medium gas into the hot zone.

Hot isotropic pressure device

A hot isostatic pressing device according to the present invention includes an inner casing, an outer casing, and a heating means which are provided inside a high-pressure container. The device further includes a first cooling means for forcedly circulating pressure medium gas in such a manner that pressure medium gas guided upwardly between the inner casing and the outer casing is guided to the outside of the outer casing through an upper part of the outer casing, cooled while being guided downwardly along an inner circumferential surface of the high-pressure container, and then returned to between the inner casing and the outer casing through a lower part of the outer casing; and a second cooling means for guiding pressure medium gas within a hot zone formed inside the inner casing to the outside of the hot zone, cooling the pressure medium gas guided to the outside by merging it with the pressure medium gas forcedly circulated by the first cooling means, and returning the cooled pressure medium gas into the hot zone. According to such a structure, a high cooling efficiency can be attained while maintaining the hot zone in a thermally uniform condition.

A hot isostatic pressing apparatus (HIP apparatus) comprises a vertically cylindrical high-pressure vessel comprising a high-pressure cylinderand upper and lower lidsanda bottomed cylindrical casingcapable of housing workpiecesand a resistance-wire heatera heat insulating structureequipped with a gas flow regulating valveand formed in a bottomed cylindrical shape on the outside of the casingso as to cover the casingand a heat sinkhaving a water cooling mechanism provided in the space defined by the heat insulating structureand the inner surface of the high-pressure cylinderwhich are provided within the high-pressure vessel; and a pressure medium gas stirring fanfor promoting the temperature uniformity of the space of the treatment chamberfor housing the workpiecesthe stirring fan being arranged on the lower lidside within the casingwhereby the cooling to a temperature range of 100&#xb0; C. or lower which allows a quenching treatment and the safe manual handling of workpieces can be efficiently performed.

Hot isostatic pressing apparatus and hot isostatic pressing method

In a high temperature/high pressure vessel for treating a workpiece placed in the interior of the vessel at a high temperature and a high pressure wherein piano wire is wound under tension round an outer periphery of a cylindrical body to apply a compressive residual stress to the cylindrical body and axial openings of the cylindrical body are tightly closed with upper and lower lids so that the lids can be disengaged from the openings, the cylindrical body is constituted as a two-layer cylindrical body comprising an inner cylinder and an outer cylinder which is fitted on the inner cylinder through plural spacers arranged along an outer periphery surface of the inner cylinder, allowing cooling water flow paths to be formed each between adjacent such spacers so as to extend from one end side to an opposite end side of the tow-layer cylindrical body. In this high temperature/high pressure vessel, vessel packings can be cooled effectively, the piano wire is not wet with cooling water, and the internal space of the vessel can be utilized effectively.

High temperature/high pressure vessel

The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least one of which has a cooling unit, a frame for holding a load acting in the axial direction of the high-pressure vessel in processing a workpiece to be processed in the high-pressure vessel, an actuator for moving the vessel component members of the high-pressure vessel in the axial direction thereof so as to load and unload the workpiece, a sealing unit fitted to a portion for loading and unloading the workpiece, which is formed when the vessel component members are moved in the axial direction of the vessel, and a retractable cotter unit for transmitting a load acting in the axial direction of the high-pressure vessel to the frame.

High-temperature high-pressure gas processing apparatus

The present invention provides a system for supplying a high-pressure medium gas suitable for processing a semiconductor to be processed by heating under isostatic pressure in a short cycle. The system includes a gas holder containing a high-pressure medium gas, a compressor for pressurizing the high-pressure medium gas supplied from the gas holder, a high-pressure vessel having a heater, an accumulator for storing the high-pressure medium gas pressurized by the compressor, a first evacuation unit for evacuating the inside of a pipeline for the high-pressure medium gas, a vacuum casing for holding the opening of the high-pressure vessel in a vacuum, a second evacuation unit for evacuating the inside of the vacuum casing, and a valve unit for connecting the high-pressure vessel and the accumulator so that series connection and parallel connection can be switched on the outlet side of the compressor.

System for supplying high-pressure medium gas

A cooling system for the hot isostatic pressurizing equipment which is provided with valves and actuators at the lower part of the equipment so that they are not subject to thermal deformation. The valves and actuators are installed independently from each other so as to eliminate a need for increasing the diameter of the vessel. The valve is attached to a lower vent hole formed in the radial direction in the supporting cylinder installed on the inner bottom closure. The valve is energized in its closing direction by a spring and is operated by the actuator installed on the outer bottom closure detachable from the inner bottom closure.

Growing community of inventors

Takasago, Japan

Tomomitsu Nakai