Lapis Semiconductor Co., Ltd.

Tomomi Yamanobe

Yoshinobu Takeshita

Minako Oritu

Kazutaka Kodama

Yuuki Doi

Toshiyuki Orita

Takao Kaji

Masao Tsujimoto

Toshifumi Kobe

Kiyofumi Kondou

Makoto Higashihira

A semiconductor device including: a first semiconductor layer having a first conductive type; a second semiconductor layer provided on the first semiconductor layer, the second semiconductor layer having a second conductive type that is a conductive type different from the first conductive type; an impurity region of the first conductive type formed at a surface of the second semiconductor layer; first electrodes contacting the impurity region, the second semiconductor layer, and the first semiconductor layer via a first insulating film; and second electrodes contacting the first electrodes via a second insulating film, and contacting the first semiconductor layer via a third insulating film, the second electrodes including PN junctions at borders between upper portions that contact the first semiconductor layer via the third insulating film and lower portions that contact the first semiconductor layer via the third insulating film.

Semiconductor device and semiconductor device manufacturing method

The disclosure reduces the risk of collapse of the wall surrounding the trench and suppresses the withstand voltage fluctuation that accompanies the manufacturing variation for a semiconductor device having a super junction structure. The semiconductor device includes a drift layer of a first conductivity type and a plurality of embedded parts embedded in the drift layer. The embedded parts are of a second conductivity type different from the first conductivity type, and the embedded parts are arranged with a first direction as a longitudinal direction and spaced from each other along a second direction that intersects the first direction. A width of each of the embedded parts in the second direction changes continuously along the first direction.

Semiconductor device having super junction structure with varying width

Growing community of inventors

Miyazaki, Japan

Tomomi Yamanobe