Sumitomo Osaka Cement Co., Ltd.

Tomomi Ito

Yukio Miura

Kenji Harada

Takeshi Otsuka

Mamoru Kosakai

Keisuke Maeda

Shinichi Maeta

Kazunori Ishimura

Hitoshi Kouno

Yuuki Kinpara

Ryo Takeda

In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing metal oxide particles which have been surface-modified by a methyl group and a phenyl group in a predetermined ratio, in a case where a transmission spectrum in a wavenumber range of 800 cmor higher and 3,800 cmor lower is measured by FT-IR, and values of the transmission spectrum are standardized, IA/IB≤3.5 is satisfied (IA represents a spectrum value standardized at 3,500 cm, and IB represents a spectrum value standardized at 1,100 cm).

Dispersion liquid, composition, sealing member, light-emitting device, illumination tool, display device, method for producing dispersion solution, and method for modifying surfaces of metal oxide particles

A dispersion liquid according to the present invention is a dispersion liquid containing metal oxide particles which have been surface-modified with a silane compound and a silicone compound, in which, when the dispersion liquid is dried by vacuum drying to separate the metal oxide particles, and a transmission spectrum of the separated metal oxide particles is measured in a wavenumber range from 800 cmto 3800 cmwith a Fourier transform infrared spectrophotometer, Formula (1) below: IA/IB≤3.5 is satisfied (in the formula, 'IA' represents a spectrum value at 3500 cmand “IB” represents a spectrum value at 1100 cm).

Dispersion liquid, composition, sealing member, light-emitting device, illumination tool, display device, and method for producing dispersion liquid

An electrostatic chuck device includes: in order, an electrostatic chuck part having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck part in a pattern having gaps; a sheet material; and a base part having a function of cooling the electrostatic chuck part, in which a silicone resin sheet having a layer thickness of 10 &#x3bc;m or more and less than 200 &#x3bc;m and a Shore hardness (A) in a range of 10 to 70 is provided between the electrostatic chuck part and the heating member.

Electrostatic chuck device including a heating member

An electrostatic chuck device includes: an electrostatic chuck part which incorporates an internal electrode for electrostatic attraction and has a placing surface on which a plate-like sample is placed; a base part which cools the electrostatic chuck part; and an adhesion layer which bonds the electrostatic chuck part and the base part to integrate the parts together, in which a first through-hole is provided in the electrostatic chuck part, a second through-hole that communicates with the first through-hole is provided in the base part, a tubular insulator is fixed in the second through-hole, an annular sealing member is sandwiched between the electrostatic chuck part and a distal end surface of the insulator, wherein the distal end surface is located on the electrostatic chuck part side of the insulator, and a tubular insulating wall member is located at the inner side of the sealing member in the radial direction.

Electrostatic chuck device

Provided is an electrostatic chuck device which includes: an electrostatic chuck section having one main surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a first adhesion layer which contains spacers and a silicone adhesive and in which a layer thickness D is in a range of 3 to 25 &#x3bc;m and a ratio (&#x3d5;/D) between the layer thickness D and an average particle diameter &#x3d5;of the spacers is in a range of 0.1 to 1.0; a plurality of heating members bonded to the surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having a gap with respect to one another by the first adhesion layer; a second adhesion layer which contains a silicone adhesive; and a base section having a function of cooling the electrostatic chuck section.

An electrostatic chuck device includes: an electrostatic chuck section having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in electrostatic attracting internal electrode; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having gaps; a sheet material; and a base section having a function of cooling the electrostatic chuck section, in this order, in which each of the gaps of the pattern is filled with an inorganic filler composition which includes an inorganic filler and an adhesive.

An electrostatic chuck deviceincludes: an electrostatic chuck sectionhaving one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in electrostatic attracting internal electrode; a first adhesion layer; a sheet material; a second adhesion layer; and a temperature adjusting base sectionwhich adjusts a temperature of the electrostatic chuck sectionto a desired temperature, in this order, in which the first adhesion layerincludes a joining layerhaving a layer thickness in a range of 1 nm to 500 nm, and a silicone adhesive layerhaving a thickness in a range of 2 &#x3bc;m to 30 &#x3bc;m, and the second adhesion layerincludes a joining layerhaving a layer thickness in a range of 1 nm to 500 nm, and a silicone adhesive layerhaving a thickness in a range of 2 &#x3bc;m to 30 &#x3bc;m.

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Tokyo, Japan

Tomomi Ito