Hitachi, Ltd.

Tomomasa Yoshida

Yukio Takahashi

Satoshi Shimada

Takashi Yamaguchi

Hiromu Hirai

Yoshimi Yamamoto

Ko Soeno

Yoshitaka Matsuoka

Akira Nagasu

Masatoshi Tsuchiya

Takeo Nagata

Syozo Kasai

Fuyuto Takase

A first table is provided on a fixed base so that the first table can be moved in one of two directions which cross each other at right angles. A second table is provided on the first table so that the second table can be moved in the other direction. Linear motors for applying the driving force to the first and second tables to directly drive these tables are provided between the fixed base and first table and between the first and second tables.

Table device

A semiconductor pressure transducer comprising a piezoresistive semiconductor diaphragm, a cylindrical stem made of a glass having a thermal expansion coefficient approximating that of the diaphragm and hermetically bonded by anodic bonding to the latter, and a cylindrical holder hermetically bonded by anodic bonding to the cylindrical stem is disclosed. The holder is made of a ferromagnetic alloy material containing Fe, Co and Ni and having a mean thermal expansion coefficient of 35.times.10.sup.-7 /.degree.C. or less within the temperature range between 30.degree. C. and 350.degree. C.

Semiconductor pressure transducer

A differential pressure transmitter has a pressure receiving portion and a sensor portion which are constituted from separate parts separably jointed with each other. The sensor portion includes a semiconductor sensor having one side formed with a resistance pattern and the other side which has a thick-walled peripheral portion and a thick-walled central portion. The semiconductor sensor is incorporated in the sensor portion as being supported at the thick-walled peripheral portion thereof. The pressure receiving portion includes seal diaphragms disposed on both sides of the pressure receiving portion and a central diaphragm disposed therein. The semiconductor sensor is arranged such that the side thereof carrying the resistance pattern faces the pressure receiving portion.

Differential pressure transmitter

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Mito, Japan

Tomomasa Yoshida