Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,326 patents)
2 patents:
1. 10151031 - Method for processing a substrate and substrate processing apparatus
2. 9714467 - Method for processing a substrate and substrate processing apparatus