Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Mitsubushi Denki Kabushiki Kaisha

Tomoko Sendai

Tatsushi Sato

Yoshihito Imai

Takuji Magara

Hidetaka Miyake

Takeshi Sakata

Akihiro Goto

Takaaki Iwata

Kenji Iriguchi

Takashi Yuzawa

Shigeru Matsuno

Hidetaka Katougi

Yoichiro Nishimoto

Seiji Sato

Teiji Takahashi

Takeyuki Maegawa

Osamu Yasuda

Yasuhiro Kawai

Koji Enomoto

Rika Sasaki

Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 &#x3a9;&#xb7;cm and equal to or lower than 5 &#x3a9;&#xb7;cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 &#x3bc;sec and equal to or lower than 4 &#x3bc;sec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.

Wire electric discharge machining method, semiconductor wafer manufacturing method, and solar battery cell manufacturing method

A change in machining volume is calculated using a shape of the electrode and a shape of the workpiece expressed by three-dimensional models and machining condition data and the machining time is calculated according to actual machining status based on the calculated change in machining volume.

Electric discharge machine that calculates and displays the machining time

An electrical discharge machining apparatus includes a simulator. The simulator calculates machining information relating to machining shape at each of several simulated machining depths, when the electrode is moved into a workpiece, until an input machining depth is obtained, based on the shape of the electrode input, the shape of the workpiece, and the machining depth of the workpiece, and determines a shape obtained by subtracting the machining shape from the shape of the workpiece, as a new shape of the workpiece, at each simulated machining depth.

Electrical discharge machining apparatus and electrical discharge machining simulator

A wire-electrical discharge machine infuses a processing liquid in a gap between a wire and a workpiece and processes the workpiece using predetermined processing parameters. The machine includes a processing parameter memory that stores processing parameters, a second memory that stores a relationship between nozzle height and processing energy, a processing energy determining unit that determines the processing energy, for example, during rough processing, based on the relationship, and a processing parameter changing unit that changes the processing parameters based on the processing energy. The workpiece is processed using the changed processing parameters. According to this construction, wire breakage can be prevented and the accuracy of the processed surface can be improved.

Electric discharge machine with changing processing parameters

To obtain high machining speed and machining accuracy in three-dimensional machining by using of an electrode of simple shape. Applying voltage between an electrode of simple shape and a workpiece, performing three-dimensional control by an NC control while synthesizing a feed of a Z-axis direction for correcting longitudinal consumed amount of an electrode with an X-Y plane feed, storing amount equivalent to an X-Y moving distance in an X-Y plane corresponding to correcting moving amount of the Z-axis direction in an electrical discharge machining method for machining a desired three-dimensional shape and performing a feed of correcting moving amount in the Z-axis direction each time a moving distance in the X-Y plane on a moving locus during machining reaches the above stored amount.

Three-dimensional electrical discharge machining method and apparatus

A method for creating machining conditions and/or machining condition series capable of meeting a plurality of the required machining specifications, in which the method designates at least one of ranges of the machining specifications, ranges of satisfaction degrees the required specifications and functions indicating satisfaction degrees to the required specifications. The method determines a compromise between the required machining specifications The required machining specifications includes surface roughness, consumption rate of the electrode and machining time.

Method for creating a machining condition series

An electric discharge machining apparatus in which at least either of a tool electrode or a workpiece is made of an anisotropic conductive material, includes, on a good conductive surface 20b of the anisotropic conductive material 2, a portion for connecting an isotropic conductive member 22. Electric discharge is generated on the good conductive surface 20b of the anisotropic conductive material 2. A conductive adhesive agent 23 is employed to bond the anisotropic conductive material 2 and the isotropic conductive member 22 to each other. The anisotropic conductive material is a pyrocarbon material. The pyrocarbon heat resolved carbon material is employed as a tool electrode material. Incombustible dielectric fluid, such as pure water, is employed as dielectric fluid. Moreover, there are provided apparatus for measuring voltage during electric discharge, apparatus for setting a threshold value for use to determine whether the electric discharge is normal electric discharge or abnormal electric discharge and apparatus for interrupting supply of a discharge current in a case where the measured discharge voltage is higher than the threshold value.

Electric discharge machining apparatus

A method for creating machining conditions and/or machining condition series capable of meeting a plurality of required machining specifications, in which the method designates at least one of ranges of the machining specifications, ranges of satisfaction degrees for the required specifications and functions indicating satisfaction degrees to the required specifications. The method determines a compromise between the required machining specifications. The required machining specifications includes surface roughness, consumption rate of the electrode and machining time.

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Tokyo, Japan

Tomoko Sendai