Tonen Corporation

Clariant Finance (bvi) Limited

Tomoko Aoki

Yasuo Shimizu

Satoshi Ueki

Takeshi Isoda

Yoshiharu Okumura

Osamu Funayama

Tadanao Kohara

Hirohiko Nakahara

Ryuji Sato

Tadashi Suzuki

Yuuji Tashiro

Hiroshi Kaya

Kunihiko Imanishi

Kiyoshi Sato

Atushi Tezuka

Hiroki Morozumi

A method for sealing a fine groove with a siliceous material, characterized as comprising applying a solution of a perhydropolysilazane having a weight average molecular weight in the range of 3,000 to 20,000 in terms of polystyrene to a substrate having at least one groove having a width of 0.2 &mgr;m or less at its deepest portion and having a ratio of the corresponding depth to the width of 2 or more, to thereby fill and seal the groove with the perhydropolysilazane, and then heating the perhydropolysilazane in an atmosphere containing water vapor to thereby convert the perhydropolysilazane to a siliceous material.

Method for sealing fine groove with siliceous material and substrate having siliceous coating formed thereon

A coating composition having an aluminum-containing polysilazane and a polyacrylate or polymethacrylate ester in an organic solvent and methods of producing the same.

Porous silica coating with low dielectric constant, semiconductor device and coating composition

An amine residue-containing polysilazane having a number average molecular weight of 100-100,000 and having a molecular chain containing a silazane structure represented by the general formula (I) shown below and/or a silazane structure represented by the general formula (II) shown below:

Aminated polysilazane and process for the preparation thereof

Method for producing ceramic products

A preceramic polymetalosilazane substantially free of Si-O groups is produced by reacting a polysilazane with a metal alkoxide in the presence of an alkylsilazane or alkylsilane. The preceramic polymer gives a high strength and heat resistant ceramic body which remains amorphous when calcined at 1,600.degree. C. for 10 hours in the atmosphere of nitrogen.

Polymetalosilazane, process of producing same, silicon nitride based

Novel silane compound, alkoxy cyclopentyl diethoxysilane, is prepared by reacting cyclopentyl trihalosilane with ROH and then with ethanol, or by reacting cyclopentyl triethoxysilane with ROH, wherein alkyl in the alkoxy or R in ROH stands for an organic group selected from tile group consisting of isopropyl, sec-butyl, tert-buryl and tert-amyl groups. The silane compounds are useful as a catalytic component for olefin polymerization and as a silane coupling agent.

Silane compound and processes for the preparation thereof

Novel silane compound, alkoxy cyclopentyl dimethoxysilane, is prepared by reacting cyclopentyl trihalosilane with ROH and then with methanol, or by reacting cyclopentyl trimethoxysilane with ROH, wherein alkyl in the alkoxy or R in ROH stands for an organic group selected from the group consisting of sec-butyl, tert-amyl, cyclopentyl, oxa-3-cyclopentyl, cyclohexyl and 2-isopropyl-5-methyl cyclohexyl groups. The silane compounds are useful as a catalytic component for olefin polymerization and as a silane coupling agent.

Novel silane compounds, tert.-butoxy cyclopentyl dimethoxysilane and isopropoxy cyclopentyl dimethoxysilane, are prepared by reacting cyclopentyl trihalosilane with ROH (where R stands for tert.-butyl or isopropyl group) and then with methanol, or by reacting cyclopentyl trimethoxysilane with ROH. The silane compounds are useful as a catlaytic component for olefin polymerization and as a silane coupling agent.

Growing community of inventors

Iruma, Japan

Tomoko Aoki